Method and apparatus for growing sapphire single crystals
AssigneeCristech Co., Ltd.
InventorJun Tae Ahn
Life of this patent
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Abstract
The present invention relates to a method and apparatus for growing sapphire single crystals, and more particularly to a method and apparatus for growing sapphire single crystals in which a high quality, long single crystal can be obtained within a short period of time upon the use of a long rectangular crucible and a long seed crystal extending in a c-axial direction. Use of the method and apparatus for growing sapphire single crystals according to the present invention can uniformly maintain the horizontal temperature at the inside of the crucible despite the use of a rectangular crucible, thereby obtaining a high-quality single crystal as well decreasing the possibility of a failure in the growth of the single crystal.
Claims8
An apparatus for growing sapphire single crystals, comprising:
- a furnace surrounding a crucible for heating the crucible, wherein the furnace is thermally insulating from the surrounding air so as to cause an internal temperature of the furnace to rise up to more than a melting temperature of a sapphire scrap;
- a crucible having a rectangular cross-sectional shape, wherein the crucible has a bottom, a front horizontal wall, a back horizontal wall, and two end walls and a horizontal wall:end wall aspect ratio more than 1.5:1, wherein the crucible can be disposed within the furnace so as to allow the sapphire scrap to be melted therein and allow a single crystal to be grown long from a seed crystal therein;
- a plurality of heaters disposed at the outside of the crucible, adjacent to the walls of the crucible, so as to melt the sapphire scrap;
- and cooling means disposed at the bottom of the crucible so as to prevent the seed crystal from being completely melted,
- wherein the plurality of heaters are disposed along the horizontal walls of the crucible to create three to six horizontal and divided heating zones, wherein each of the divided heating zones are independently controlled so as to uniformly maintain temperature along the horizontal walls of the crucible, and
- wherein each heating zone comprises (a) a pair of lateral heating elements which are disposed at the front and back horizontal walls of the crucible, wherein each heating element is connected to an electrode and the corresponding heating element, and (b) a connecting heating element for interconnecting each pair of lateral heating elements;
- and
- wherein the crucible is arranged to accommodate a seed crystal that can extend in a c-axial direction so that a sapphire single crystal can be grown in the c-axial direction.
Dependencies are inferred from the claim text.