Gas nozzle and plasma device employing same
AssigneeKYOCERA Corporation
InventorYuki Kajiwara
Life of this patent
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Abstract
A gas nozzle according to an embodiment of the present invention includes a columnar main body including a ceramic sintered body having a through hole through which gas flows. An outlet of the through hole for the gas is formed on one end face of the main body. An inner wall of the through hole has a first region located in a vicinity of the outlet, and a second region located further inward of the main body than the first region. The first region and the second region each include a sintered surface of the ceramic sintered body. Average crystal grain size in the first region is larger than average crystal grain size in the second region.
Claims8
A gas nozzle comprising a columnar main body including a ceramic sintered body having a through hole through which gas flows, wherein
- an outlet of the through hole for the gas is formed on one end face of the main body,
- an inner wall of the through hole has a first region located in a vicinity of the outlet, and a second region located further inward of the main body than the first region,
- the first region and the second region each include a sintered surface of the ceramic sintered body, and
- average crystal grain size in the first region is larger than average crystal grain size in the second region.
Dependencies are inferred from the claim text.