Mask frame assembly, method of manufacturing the same, and method of manufacturing organic light-emitting display apparatus
AssigneeSamsung Display Co., Ltd.
InventorsJunhyeuk Ko, Daewon Baek, Eunji Lee
Life of this patent
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Abstract
A mask frame assembly includes a frame, and a mask tensioned on the frame in a first direction, the mask having a deposition pattern portion having a plurality of pattern holes therethrough, a deposition material being deposited on a substrate through the pattern holes, and a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in a second direction as a distance from the deposition pattern portion in the first direction increases, the second direction being oriented along a normal to the mask.
Claims17
A mask frame assembly, comprising:
- a frame;
- and
- a mask tensioned on the frame in a first direction, the mask including:
- a deposition pattern portion having a plurality of pattern holes therethrough, such that a deposition material passing through the pattern holes in a second direction is deposited on a substrate, and
- a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in the second direction as a distance from the deposition pattern portion in the first direction increases.
A method of manufacturing a mask frame assembly, the method comprising:
- preparing a frame;
- preparing a mask, the mask including:
- a deposition pattern portion having a plurality of pattern holes therethrough, such that a deposition material passing through the pattern holes in a second direction is deposited on a substrate, and
- a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in the second direction as a distance from the deposition pattern portion in the first direction increases;
- and
- installing the mask on the frame while tensioning both ends of the mask in the first direction.
A method of manufacturing an organic light-emitting display apparatus, the method comprising:
- forming a first electrode and a second electrode that are opposite to each other on a substrate;
- forming an organic layer between the first electrode and the second electrode,
- wherein the organic layer or the second electrode is deposited by using a mask frame assembly including:
- a frame, and
- a mask tensioned on the frame in a first direction, the mask including:
- a deposition pattern portion having a plurality of pattern holes therethrough, such that a deposition material passing through the pattern holes in a second direction is deposited on a substrate, and
- a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in the second direction as a distance from the deposition pattern portion in the first direction increases.
Dependencies are inferred from the claim text.