Emissivity controlled coatings for semiconductor chamber components
AssigneeFM Industries, Inc.
InventorsMahmood Naim, David Hammerich
Life of this patent
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Abstract
A component for a semiconductor processing chamber, the component including a substrate and a coating layer provided on a surface of the substrate, wherein the coating layer includes at least a first coating layer having a thermal emissivity of more than 0.98 to 1, having plasma resistance, and having a color value L in a range of 35 to 40 through a thickness direction thereof.
Claims23
A coating comprising:
- at least a first coating layer having a thermal emissivity of more than 0.98 to 1, and having a color value L in a range of 35 to 40 through a thickness direction thereof, wherein said coating has a surface roughness of 60 to 120 μin Ra.
A component for a semiconductor processing chamber, the component comprising:
- a substrate;
- and
- a coating provided on a surface of said substrate, said coating comprising at least a first coating layer having a thermal emissivity of more than 0.98 to 1, and having a color value L in a range of 35 to 40 through a thickness direction thereof wherein said coating has a surface roughness of 60 to 120 μin Ra.
The component for a semiconductor processing chamber according to claim, 11 wherein in said first coating layer, compounds of the yttrium and oxygen, zirconium and oxygen or hafnium and oxygen are concentrated in distinct segments of layers that are uniformly distributed in a direction that extends parallel to said surface of said substrate on which said coating is formed.
A method for providing an emissivity controlled coating for a semiconductor processing chamber component, said method comprising the steps of:
- providing a component for use in a semiconductor processing chamber;
- applying a coating to a surface of said component using one of a plasma thermal spray device, HVOF, a D-Gun, SPS, AD and combinations thereof;
- wherein said coating comprises at least a first coating layer, said at least first coating layer having a thermal emissivity of more than 0.98 to 1, and having a color value L in a range of 35 to 40 through a thickness direction thereof, wherein said coating has a surface roughness of 60 to 120 μin Ra.
Dependencies are inferred from the claim text.