Aqueous detergent soluble coating and adhesive and methods of temporary bonding for manufacturing

Abstract

Compositions and methods are described for a temporary coating and adhesive with adjustable acidity for use in coating work units as a planarization coating over high topography and also for affixing thin units onto a carrier whereby such compositions provide sufficient properties to support a manufacturing process, and upon completion, the compositions are removed by an aqueous detergent that dissolves and releases the work unit within a rapid time frame without harm to its integrity. The temporary adhesive provides a tunable acidity based upon Lewis acid represented as its acid dissociative constant, Ka, where it is preferred to have Ka≧1×10−6 (pKa≦6), more preferred Ka≧1×10−5 (pKa≦5), and most preferred Ka≧1×10−4 (pKa≦4). The temporary coating and adhesive may be applied and cured in a variety of ways that meet the needs of the work unit and objectives of the manufacturing process. The invention provides benefits of flexibility and reduced cost when establishing practices to handle difficult work units in the manufacture of semiconductors and flat panel displays.

Dependencies are inferred from the claim text.