Vapor source using solutions of precursors in terpenes
AssigneePresident and Fellows of Harvard College
InventorRoy Gerald Gordon
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Abstract
This disclosure relates to terpene solutions of metal precursors used for chemical vapor deposition, atomic layer deposition, spray pyrolysis or misted deposition. The terpenes do not supply impurities such as oxygen or halogens to the material being produced, nor do they etch or corrode them. In spray pyrolysis or misted deposition, small droplets provide uniform coating. Terpenes have high flash points and low flammability, reducing the risk of fires. Terpenes have low toxicity and are biodegradable. They are available in large amounts from renewable, natural plant sources, and are low in cost.
Claims21
A liquid solution comprising:
- an acyclic, terpene solvent;
- and
- a precursor containing at least one metal or metalloid atom;
- wherein the terpene solvent is a liquid;
- wherein the terpene solvent and the precursor have vaporization rates in which the T1/2 values of the terpene solvent and the precursor differ by less than 100° C., as determined by thermogravimetric analyses;
- and
- wherein the liquid solution is suitable for use in one of chemical vapor deposition and atomic layer deposition.
Dependencies are inferred from the claim text.