Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorsSatoko Gatineau, Changhee Ko
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Abstract
Cobalt-containing compounds, their synthesis, and their use for the deposition of cobalt containing films are disclosed. The disclosed cobalt-containing compounds have one of the following formulae: wherein each of R1, R2, R3, R4 and R5 is independently selected from Hydrogen; halogen; linear, cyclic or branched hydrocarbons; primary amino ligands (—NHR); or secondary amino ligands (—NRR′), with R and R′ independently being H or a linear, cyclic or branched hydrocarbon, provided at least one of R1, R2, or R3 in Formula I and R4 or R5 in Formula II is an amino ligand.
Claims20
A compound having one of the following formulae:
- wherein each of R1, R2, R3, R4, and R5 is independently selected from the group consisting of Hydrogen;
- a halogen;
- linear, cyclic or branched hydrocarbons;
- primary amino ligands (—NHR);
- and secondary amino ligands (—NRR′), with R and R′ independently being H, a linear, cyclic or branched hydrocarbon, or SiMe3 provided at least one of R1, R2, or R3 in Formula I and R4 or R5 in Formula II is an amino ligand.
A method of depositing a cobalt-containing film, the method comprising:
- introducing a cobalt-containing compound into a reactor having a substrate disposed therein, wherein the cobalt-containing compound has one of the formulae:
- wherein each of R1, R2, R3, R4, and R5 is independently selected from the group consisting of Hydrogen;
- a halogen;
- linear, cyclic or branched hydrocarbons;
- primary amino ligands (—NHR);
- and secondary amino ligands (—NRR′), with R and R′ independently being H or a linear, cyclic or branched hydrocarbon, provided at least one of R1, R2, or R3 in Formula I and R4 or R5 in Formula II is an amino ligand;
- depositing at least part of the cobalt-containing compound onto the substrate to form the cobalt-containing film.
Dependencies are inferred from the claim text.