Reagent for enhancing generation of chemical species

A composition comprising:

• a reagent and
• a precursor,
• wherein the reagent enhances the generation of a chemical species from the Precursor;
• wherein the reagent generates an intermediate by a first exposure using a light the wavelength of which is shorter than or equal to 15 nm;
• wherein a product is formed from the intermediate by a first elimination and a second elimination;
• wherein the product is excited by a second exposure using a light of which wavelength is longer than or equal to 300 nm;
• wherein the reagent transmutes into the product acting as a photosensitizer or acts as an acid generation enhancer;
• and
• wherein the reagent has a moiety represented by chemical Formula (I):
• where:
• each of M1 and M2 in chemical Formula (I) is a carbon atom;
• at least one of A, B, and C in chemical Formula (I) is hydrogen and the rest of A, B, and C in chemical Formula (I) is aryl;
• at least one of D and E in chemical Formula (I) is hydrogen and the rest of D and E in chemical Formula (I) is an aryl group;
• and
• F is selected from the group consisting of an organosilyl group, an organogermyl group, and an organotin group.