Back to results
US 9,790,238 B2Granted
Strontium precursor, method for preparing same, and method for forming thin film by using same
AssigneeKorea Research Institute of Chemical Technology
InventorsBo-Keum Park, Taek-Mo Chung, Chang-Gyoun Kim, Sheby Mary George, Young-Kuk Lee, Jong-Sun Lim, Seog-Jong Jeong, Dong-Ju Jeon, Ki-Seok An, Sun-Sook Lee
Life of this patent
Estimating the term…
Abstract
Disclosed herein is a novel strontium precursor containing a beta-diketonate compound. Being superior in thermal stability and volatility, the strontium precursor can form a quality strontium thin film.
Claims5
A strontium precursor, represented by the following Chemical Formula 5:
- wherein,
- R1, R2, R3, R4, and R5 are independently methyl group (—CH3);
- R6 and R7 are independently tertiary-butyl group (—C(CH3)3);
- and
- m and n are independently 1.
2 more elements
Dependencies are inferred from the claim text.