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US 9,790,083 B2Granted
Vibrator, manufacturing method of vibrator, electronic device, electronic apparatus, and moving object
AssigneeSeiko Epson Corporation
InventorTeruo Takizawa
Life of this patent
Estimating the term…
Abstract
A vibrator includes a base, a lid, and a functional element that is stored in a cavity formed by the base and the lid, in which the lid is provided with a sealing hole that penetrates through the lid and a sealing member that air-tightly seals the sealing hole, and in which the functional element includes a diffusion object shielding portion having a region of an accommodation opening which overlaps at least part of a region of a first opening of the sealing hole on a surface of the lid on the cavity side in a plan view of the functional element and the lid.
Claims20
A vibrator comprising:
- a base having a peripheral area and a center area, the peripheral area being provided along an outer circumference of the base;
- a lid that has a top surface and a bottom surface opposite to each other, the lid being fixed to the base so as to form a cavity between the lid and the base;
- a sealing hole that is formed in the lid so that the sealing hole extends from the top surface to the bottom surface of the lid;
- a sealing member that is disposed in the sealing hole;
- a functional element that is located in the cavity, the functional element having:
- a driving member that is movable in the cavity;
- a driving fixed electrode;
- a detection fixed electrode;
- and
- first, second, and third wirings, one of the first, second and third wirings being connected to one of the driving member, the driving fixed electrode, and the detection fixed electrode, the first, second, and third wirings being formed on the peripheral area of the base and being formed in parallel to each other;
- and
- a diffusion object shielding member that is provided on the peripheral area to collect a diffusion object generated by the sealing member, the diffusion object shielding member having an accommodation opening facing the lid,
- wherein the sealing hole includes a first opening on the bottom surface of the lid,
- the first opening is located completely within the accommodation opening in a plan view, and
- the second wiring is sandwiched by the first and third wirings in the plan view, and the second wiring has two bifurcations to form a framed-shaped area corresponding to the accommodation opening in the plan view.
12 more elements
A vibrator comprising:
- a base having a peripheral area and a center area, the peripheral area being provided along an outer circumference of the base;
- a lid that has a top surface and a bottom surface opposite to each other, the lid being fixed to the base so as to form a cavity between the lid and the base;
- a sealing hole formed in the lid so that the sealing hole extends from the top surface to the bottom surface of the lid;
- a sealing member disposed in the sealing hole;
- a functional element located in the cavity, the functional element having:
- a detection fixed electrode;
- and
- a wiring connected to the detection fixed electrode, wherein the wiring is formed on the peripheral area of the base;
- and
- a diffusion object shielding member provided on the peripheral area and configured to collect a diffusion object generated by the sealing member, the diffusion object shielding member having an accommodation opening facing the lid,
- wherein the sealing hole includes a first opening on the bottom surface of the lid,
- the first opening is located completely within the accommodation opening in a plan view, and
- the wiring has two bifurcations forming a framed-shaped area corresponding to the accommodation opening in the plan view.
10 more elements
Dependencies are inferred from the claim text.