Induction heater system for a fluidized bed reactor
AssigneeCorner Star Limited
InventorsVivek Tomar, Puneet Gupta, Satish Bhusarapu
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Abstract
A system for the production of a polycrystalline silicon product is disclosed. The system includes a reaction chamber, a susceptor, an induction unit, and a plurality of energy sources. The reaction chamber has a reactor wall, and the susceptor encircles the reactor wall. The induction heater surrounds the susceptor, and has multiple induction coils for producing heat in the susceptor. The coils are grouped into a plurality of zones. The plurality of energy sources supply electric current to the coils. Each energy source is connected with the coils of at least one zone.
Claims17
A system for producing a polycrystalline silicon product, the system comprising:
- a reaction chamber having a reactor wall;
- a susceptor encircling the reactor wall;
- an induction unit surrounding the susceptor, the induction unit having multiple induction coils for producing heat in the susceptor, the coils grouped into a plurality of zones, the coils of each zone being divided into multiple sub-zones;
- and
- a plurality of energy sources for supplying an electric current to the coils, each energy source connected with the coils of at least one zone, each sub-zone of one of the zones being connected with a separate energy source.
A method for producing a polycrystalline silicon product in a reactor having multiple induction coils grouped into multiple zones and a plurality of energy sources and a susceptor, each zone being divided into multiple sub-zones, each of the plurality of energy sources connected with the coils of at least one zone, each sub-zone connected with a separate energy source, the method comprising:
- supplying an electric current from each energy source to the coils of at least one zone to create an electromagnetic field about the coils, the supply of electric current from each energy source being independent of electric current from another energy source;
- producing eddy currents in the susceptor;
- and
- generating heat in the susceptor.
Dependencies are inferred from the claim text.