Back to results
US 9,786,787 B2Granted
Semiconductor device and fabrication method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Yasuyuki Arai, Jun Koyama
Life of this patent
Estimating the term…
Abstract
A p channel TFT of a driving circuit has a single drain structure and its n channel TFT, an LDD structure. A pixel TFT has the LDD structure. A pixel electrode disposed in a pixel unit is connected to the pixel TFT through a hole bored in at least a protective insulation film formed of an inorganic insulating material and formed above a gate electrode of the pixel TFT, and in an inter-layer insulation film disposed on the insulation film in close contact therewith. These process steps use 6 to 8 photo-masks.
Claims9
A semiconductor device comprising:
- a first substrate;
- a second substrate facing to the first substrate;
- a shading film between the first substrate and the second substrate;
- a pixel region comprising:
- a first transistor over the first substrate, the first transistor comprising:
- a first semiconductor layer including a first channel formation region and a second channel formation region;
- a first gate electrode and a second gate electrode overlapping with the first channel formation region and the second channel formation region, respectively, with a gate insulating layer interposed therebetween;
- and
- one of a source electrode and a drain electrode connected to the first semiconductor layer;
- a second transistor over the first substrate;
- a first spacer overlapping with a third channel formation region of a second semiconductor layer of the second transistor;
- and
- a second spacer overlapping with the first semiconductor layer of the first transistor,
- wherein the first transistor is a top gate transistor,
- wherein a width of the shading film is greater than a width of the second spacer,
- wherein the shading film overlaps with the first channel formation region,
- wherein a size of the second spacer is different with a size of the first spacer, and
- wherein the second spacer overlaps with the one of the source electrode and the drain electrode.
15 more elements
Dependencies are inferred from the claim text.