# US 9,780,290 B2 · Precision return actuator

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- Number: US 9,780,290 B2
- Document ID: US9780290B2
- Status: Granted
- Kind: B2
- Application number: 14/572,558
- Filed: 2014-12-16
- Published: 2015-06-18
- Granted: 2017-10-03
- Earliest claimed: 2013-12-18
- Assignees: Thales; Cedrat Technologies
- Applicants: Thales; Cedrat Technologies
- Inventors: Christophe Devilliers; Félix Aguilar; Julien Ducarne; Francois Barillot; Frank Claeyssen
- Web page: https://patentgrep.com/patent/US9780290B2

## CPC

- H10N 30/206: {using only longitudinal or thickness displacement, e.g. d33 or d31 type devices}
- H02N 2/02: producing linear motion, e.g. actuators; Linear positioners {; Linear motors}
- H02N 2/06: Drive circuits; Control arrangements {or methods}
- H10N 35/00: Magnetostrictive devices (integrated devices or assemblies of multiple devices H10N39/00)
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

## Abstract

A nanometer-scale precision actuator comprises a base, an intermediate structure, an output interface, and two linear elements producing a controllable extension in the same longitudinal direction, each between a first and a second end. A first of the two elements has a first end fixed onto the intermediate structure and a second end fixed onto the base, a second of the two elements has a first end fixed onto the intermediate structure and a second end fixed to the output interface. The base and the intermediate structure are positioned in such a manner that the controllable extension of the second element produces a displacement of the actuator in a first direction and the controllable extension of the first element produces a displacement of the actuator in a second direction, opposite to the first direction, with respect to the base.

## Claims

### Claim 1

An actuator comprising:
a base,
an intermediate structure,
an output interface, and
two linear elements producing a controllable extension in the same longitudinal direction, each between a first and a second end, a first of the two elements having a first end fixed onto the intermediate structure and a second end fixed onto the base, a second of the two elements having a first end fixed onto the intermediate structure and a second end fixed to the output interface,
wherein the base and the intermediate structure are positioned in such a manner that the controllable extension of the second element produces a displacement of the output interface in a first direction and the controllable extension of the first element produces a displacement of the output interface in a second direction, opposite to the first direction, with respect to the base, and
wherein the actuator comprises deformation gauges mounted on the elements, wherein the gauges are connected so as to amplify the effect with a view to a measurement of the extension between the base and the output interface; and
wherein the base, the intermediate structure, the output interface and the two elements form several components forming a stack and wherein it comprises a thermal regulation insert positioned between two components of the stack.

### Claim 2 (depends on 1)

The actuator according to claim 1, wherein the intermediate structure has a U shape composed of a central part parallel to the longitudinal direction, of a first part onto which the second element is fixed and of a second part parallel to the first part, substantially perpendicular to the central part, and wherein the thermal regulation insert is positioned between the second part and the first element.

### Claim 3 (depends on 1)

The actuator according to claim 1, wherein the intermediate structure is configured in such a manner that the thermal expansion coefficient of the actuator has a predetermined value.

### Claim 4 (depends on 3)

The actuator according to claim 3, wherein the elements are based on piezoelectric, magnetostrictive or electrostrictive materials.

### Claim 5 (depends on 4)

The actuator according to claim 4, wherein the elements are identical.

### Claim 6 (depends on 1)

The actuator according to claim 1, further comprising a control common to the two elements, and wherein the control is configured so as to have a first effect on one element and a second effect, inverse to the first effect, on the second element.

### Claim 7 (depends on 6)

The actuator according to claim 6, further comprising a closed-loop feedback of the control as a function of a measurement of the extension between the base and the output interface.

### Claim 8 (depends on 6)

Use of an actuator according to claim 6, whose common control has an amplitude A, wherein it consists in defining a reference position of the actuator for a control value equal to A/2.