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US 9,773,818 B2Granted
Display device having transparent conductive film and metal film
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorHajime Kimura
Life of this patent
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Abstract
It is an object of the present invention to form a pixel electrode and a metal film using one resist mask in manufacturing a stacked structure by forming the metal film over the pixel electrode. A conductive film to be a pixel electrode and a metal film are stacked. A resist pattern having a thick region and a region thinner than the thick region is formed over the metal film using an exposure mask having a semi light-transmitting portion. The pixel electrode, and the metal film formed over part of the pixel electrode to be in contact therewith are formed using the resist pattern. Accordingly, a pixel electrode and a metal film can be formed using one resist mask.
Claims18
A display device comprising:
- a pixel portion over a substrate,
- wherein the pixel portion comprises:
- a semiconductor film,
- a wiring over and electrically connected to the semiconductor film,
- an organic resin layer over the wiring,
- a transparent conductive film over the organic resin layer, and
- a metal film over and in direct contact with a top surface of the transparent conductive film,
- wherein the metal film comprises an opening in which a region of the transparent conductive film is exposed,
- wherein the pixel portion comprises a first region and a second region surrounding the first region,
- wherein the first region has a light-transmitting property,
- wherein the first region comprises the organic resin layer and the transparent conductive film,
- wherein the second region comprises the wiring, the organic resin layer, the transparent conductive film and the metal film,
- wherein the top surface of the transparent conductive film is covered with the metal film in the second region,
- wherein a side at an end of the metal film is inclined with respect to the substrate, and
- wherein the inclined side at the end of the metal film is covered by an insulating film.
12 more elements
A display device comprising:
- a pixel portion over a substrate,
- wherein the pixel portion comprises:
- a semiconductor film,
- a wiring over and electrically connected to the semiconductor film,
- an organic resin layer over the wiring,
- a transparent conductive film over the organic resin layer, and
- a metal film over and in direct contact with a top surface of the transparent conductive film,
- wherein the metal film comprises an opening in which a region of the transparent conductive film is exposed,
- wherein the pixel portion comprises a first region and a second region surrounding the first region,
- wherein the first region has a light-transmitting property,
- wherein the first region comprises the organic resin layer and the transparent conductive film,
- wherein the second region comprises the wiring, the organic resin layer, the transparent conductive film and the metal film,
- wherein the top surface of the transparent conductive film is covered with the metal film in the second region,
- wherein a side at an end of the metal film is inclined with respect to the substrate,
- wherein the inclined side at the end of the metal film is covered by an insulating film,
- wherein the transparent conductive film comprises at least one of indium tin oxide, indium tin silicon oxide, indium zinc oxide, a zinc oxide and a tin oxide, and
- wherein the metal film comprises at least one of Ti, Mo, Ta, Cr, W and Al.
14 more elements
A display device comprising:
- a pixel portion over a first substrate,
- wherein the pixel portion comprises:
- a semiconductor film,
- a wiring over and electrically connected to the semiconductor film,
- an organic resin layer over the wiring,
- a transparent conductive film over the organic resin layer,
- a metal film over and in direct contact with a top surface of the transparent conductive film, and
- a light-shielding film
- wherein the metal film comprises an opening in which a region of the transparent conductive film is exposed,
- wherein the pixel portion comprises a first region and a second region surrounding the first region,
- wherein the first region has a light-transmitting property,
- wherein the first region comprises the organic resin layer and the transparent conductive film,
- wherein the second region comprises the wiring, the organic resin layer, the transparent conductive film, and the metal film,
- wherein the top surface of the transparent conductive film is covered with the metal film in the second region,
- wherein the light-shielding film and the metal film overlap with each other in the second region,
- wherein a side at an end of the metal film is inclined with respect to the first substrate, and
- wherein the inclined side at the end of the metal film is covered by an insulating film.
14 more elements
Dependencies are inferred from the claim text.