Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus

An ion-electron multi-beam apparatus comprising:

• an electron source having:
• an iridium tip as a tip which is configured to emit electrons, the iridium tip comprising a pyramid structure wherein an apex portion of the pyramid structure has an apex with <210> orientation surrounded by one {100} crystal plane and two {111} crystal planes,
• wherein the pyramid structure includes a first layer composed of a single iridium atom constituting the apex of the pyramid structure, a second layer immediately below the first layer and composed of three iridium atoms located at vertices of a triangle, and a third layer immediately below the second layer and composed of six iridium atoms located at vertices and sides of a triangle, and
• wherein the crystal planes of the pyramid structure are defined by the iridium atoms of the first, second, and third layer;
• and
• an extraction electrode which is configured to generate the electrons and apply a voltage for extracting the electrons from the iridium tip;
• and
• a control section which is configured to irradiate substantially same position on a sample with a focused ion beam and an electron beam,
• wherein the electron beam is obtained from the electron source.

A scanning probe microscope comprising:

• an iridium tip as a probe, the iridium tip comprising a pyramid structure wherein an apex portion of the pyramid structure has an apex with <210> orientation surrounded by one {100} crystal plane and two {111} crystal planes,
• wherein the pyramid structure includes a first layer composed of a single iridium atom constituting the apex of the pyramid structure, a second layer immediately below the first layer and composed of three iridium atoms located at vertices of a triangle, and a third layer immediately below the second layer and composed of six iridium atoms located at vertices and sides of a triangle, and
• wherein the crystal planes of the pyramid structure are defined by the iridium atoms of the first, second, and third layer;
• and
• a control section which is configured to measure a shape and a state at an atomic level of a surface of a sample by scanning the probe in a state where the probe is brought close to the surface of the sample.