Positive-type resist composition, method for forming resist pattern, photo-reactive quencher, and polymeric compound

A positive-type resist composition which generates an acid upon exposure and whose solubility in an alkali developing solution increases under the action of an acid, the composition comprising a base material component (A) whose solubility in an alkali developing solution increases under the action of an acid and which includes a resin component (A2) including a polymeric compound having a structural unit (a6) derived from a compound represented by the following general formula (a6-1):

• wherein Z01 to Z04 each independently represents a substituent having electron withdrawing properties,
• Rb21 and Rb22 each independently represents an alkyl group, an alicyclic hydrocarbon group which may have a substituent, or a hydroxyl group, with the proviso that the substituent which Rb21 and Rb22 may have does not have a substituent having electron withdrawing properties,
• Rb1 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, or an alkenyl group which may have a substituent,
• n1 and n2 each independently represents an integer of 0 to 3, and
• X11-1− represents an organic anion represented by any one of general formulae (a6-1-1) to (a6-1-3), and, in general formulae (a6-1-1) to (a6-1-3),
• Rb201 represents a chain-like alkenyl group which may have a substituent,
• Rb204 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent,
• Rb205 represents a chain-like alkenyl group which may have a substituent
• Rb206 to Rb208 each independently represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, with the proviso that at least one of Rb206 to Rb208 represents a chain-like alkenyl group which may have a substituent,
• Rb102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms,
• Yb101 represents a single bond, or a divalent linking group including an oxygen atom,
• Vb101 to Vb103 each independently represents a single bond, an alkylene group, a fluorinated alkylene group, an arylene group, or a fluorinated arylene group,
• Lb101 and Lb102 each independently represents a single bond or an oxygen atom,
• Lb103 to Lb105 each independently represents a single bond, —CO—, or —SO2—, and
• n101 is 0 or 1.

A photo-reactive quencher comprising

• a compound (md) represented by the following general formula (m0-d):
• Z01 to Z04 each independently represents a substituent having electron withdrawing properties,
• Rb21 and Rb22 each independently represents an alkyl group, an alicyclic hydrocarbon group which may have a substituent, or a hydroxyl group, with the proviso that the substituent which Rb21 and Rb22 may have does not include a substituent having electron withdrawing properties,
• Rb1 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, or an alkenyl group which may have a substituent,
• n1 and n2 each independently represents an integer of 0 to 3, and
• X0−represents an organic anion represented by any one of general formulae (d1-an-1) to (d1-an-3),
• in general formulae (d1-an-1) to (d1-an-3),
• Rd1 to Rd4 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, with the proviso that two or more fluorine atoms are not bonded to a carbon atom adjacent to the S atom in Rd2 of formula (d1-an-2), and
• Yd1 represents a single bond or a divalent linking group.

A polymeric compound comprising a structural unit derived from a compound represented by the following general formula (a6-1):

• wherein Z01 to Z04 each independently represents a substituent having electron withdrawing properties,
• Rb21 and Rb22 each independently represent an alkyl group, an alicyclic hydrocarbon group which may have a substituent, or a hydroxyl group, with the proviso that the substituent which Rb21 and Rb22 may have does not include a substituent having electron withdrawing properties,
• Rb1 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, or an alkenyl group which may have a substituent,
• n1 and n2 each independently represents an integer of 0 to 3, and
• X11-1−represents an organic anion represented by any one of general formulae (a6-1-1) to (a6-1-3),
• in general formulae (a6-1-1) to (a6-1-3),
• Rb201 represents a chain-like alkenyl group which may have a substituent,
• Rb204 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent,
• Rb205 represents a chain-like alkenyl group which may have a substituent,
• Rb206 to Rb208 each independently represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, with the proviso that at least one of Rb206 to Rb208 represents a chain-like alkenyl group which may have a substituent,
• Rb102 represents a fluorine atom, or a fluorinated alkyl group having 1 to 5 carbon atoms,
• Yb101 represents a single bond, or a divalent linking group including an oxygen atom,
• Vb101 to Vb103 each independently represents a single bond, an alkylene group, a fluorinated alkylene group, an arylene group, or a fluorinated arylene group,
• Lb101 and Lb102 each independently represents a single bond or an oxygen atom,
• Lb103 to Lb105 each independently represents a single bond, —CO—, or —SO2—, and
• n101 is 0 or 1.