Hybrid MEMS microfluidic gyroscope

A hybrid MEMS microfluidic gyroscope, comprising:

• a micro-machined base enclosure having a top fluid enclosure, a fluid sensing enclosure and a bottom fluid enclosure, the top fluid enclosure defining a pair of discrete canals on a bottom side of the top fluid enclosure, the fluid sensing enclosure including a sensing structure, which is accessible to a fluid via an opening on either side of the fluid sensing enclosure and the bottom fluid enclosure including glass that defines two discrete canals on a top side of the bottom fluid enclosure;
• a plurality of piezo-resistors disposed within the micro-machined base enclosure, the piezo-resistors is deformed by the fluid, the fluid prevents gravitational forces asserted onto the hybrid MEMS microfluidic gyroscope from affecting the piezo-resistors;
• and
• a plurality of cantilevers disposed within the micro-machined base enclosure, the cantilevers serve as a plurality of hair cells, wherein angular rotation of the hybrid MEMS microfluidic gyroscope creates an inertial force, which increases pressure on the cantilevers, leading to a detectable deflection that is proportional to the angular rotation.