Monolithically integrated multi-sensor device on a semiconductor substrate and method therefor

A monolithically integrated multi-sensor (MIMs) comprising:

• a first integrated circuit comprising:
• a magnetic sensor configured to measure a magnetic parameter;
• and
• a first MEMs sensor configured to measure a first parameter;
• a second MEMs sensor configured to measure a second parameter;
• and
• a third MEMs sensor configured to measure a third parameter wherein the magnetic parameter, the first parameter, the second parameter, and the third parameter are different and wherein the magnetic sensor, the first MEMs sensor, and the second MEMs sensor are formed on or in a single semiconductor substrate.

A monolithically integrated multi-sensor (MIMs) comprising:

• a first integrated circuit comprising:
• a magnetic sensor configured to measure a magnetic parameter;
• and
• at least one MEMs sensor configured to measure a first parameter wherein the magnetic parameter and the first parameter are different and wherein the magnetic sensor and the at least one MEMs sensor are formed on or in a single semiconductor substrate.