Method and control unit for operating a plasma generation apparatus
AssigneeOerliken Metco AG, Wohlen
InventorsFlorian Liechti, Albert Friedery, Hartmut Koschnitzke, Rene Groeber
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AssigneeOerliken Metco AG, Wohlen
InventorsFlorian Liechti, Albert Friedery, Hartmut Koschnitzke, Rene Groeber
Estimating the term…
The invention relates to a method and to a control unit for operating the plasma generation apparatus. The invention is based on a method and a control unit in which a voltage is applied as an ignition voltage between an anode and a cathode for ignition of a plasma. In order to enable a gentle operation of the plasma generation apparatus it is provided in accordance with the invention that a check is continuously carried out during the ignition process whether the ignition of the plasma has been effected. Additionally, the ignition voltage (UZ) is increased starting from an initial ignition voltage (UZA) and after recognizing an effected ignition (at the point in time tZ) of the plasma, the voltage is reduced between the anode and the cathode to a maintenance voltage (UA).
A method of initiating plasma in an apparatus comprising an anode and a cathode, the method comprising:
A plasma initiation control system comprising:
A plasma initiation control system comprising:
A method of initiating plasma using a plasma initiation control system comprising a voltage source connected to an anode and a cathode of a plasma generating apparatus, an ignition voltage source connected to the anode and the cathode, and a control unit connected to the ignition voltage source, the method comprising:
Dependencies are inferred from the claim text.