Electro-acoustic transducer
AssigneeGlobalMEMS Co., Ltd.
InventorsShih-Hsiung Tseng, Ming-Ching Wu
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Abstract
An electro-acoustic transducer includes a base, a plurality of vibration portions and a connection portion. Each of the vibration portion includes a piezoelectric transduction layer and has a first connection end and a second connection end opposite to each other, and the first connection ends are connected to the base. The connection portion is separated from the base and connected to the second connection ends. The piezoelectric transduction layers are adapted to receive electrical signals to deform, such that the vibration portions are driven to vibrate and generate corresponding acoustic waves. The vibration portions are adapted to receive acoustic waves to vibrate, such that the piezoelectric transduction layers are driven to deform and generate corresponding electrical signals.
Claims6
An electro-acoustic transducer, comprising:
- a base;
- a plurality of vibration portions, wherein each of the vibration portions comprises a piezoelectric transduction layer and has a first connection end and a second connection end opposite to each other, and the first connection ends are connected to the base;
- and
- a connection portion, separated from the base and connected to the second connection ends, wherein the piezoelectric transduction layers are adapted to receive electrical signals to deform, such that the vibration portions are driven to vibrate and generate corresponding acoustic waves, and the vibration portions are adapted to receive acoustic waves to vibrate, such that the piezoelectric transduction layers are driven to deform and generate corresponding electrical signals,
- wherein each of the piezoelectric transduction layers comprises an upper electrode layer, a piezoelectric material layer and a lower electrode layer, and the piezoelectric material layer is disposed between the upper electrode layer and the lower electrode layer,
- and wherein the upper electrode layer comprises a first electrode region and a second electrode region, the first electrode region and the second electrode region are separated from each other, the first electrode region is aligned with the first connection end, and the second electrode region is aligned with the second connection end and the connection portion.
Dependencies are inferred from the claim text.