Resonant compensating loop for shielding of metal for magnetically coupled NFC and/or RFID devices, and methods of making and using the same

A method of manufacturing a near field communication device, comprising:

• a) forming an antenna on a dielectric substrate or on an insulating or dielectric layer, said antenna receiving a first near field signal and transmitting or broadcasting a second near field signal, and coupled to a receiver and a transmitter, said antenna generating a flux;
• b) forming a resonant compensating loop configured to be electromagnetically coupled to said antenna, that mitigates or counteracts an electromagnetic effect of metal on or near a surface of said dielectric substrate, said resonant compensating loop having at least two turns or loops, wherein a current in the resonant compensating loop has a direction that aids the flux generated by the antenna;
• and
• c) placing and/or forming said antenna, said dielectric substrate, said insulating or dielectric layer, and said compensating loop in a housing of the near field communication device such that said resonant compensating loop is on an opposite side of said insulating or dielectric layer from said antenna.

A method of monitoring at least one parameter of a semiconductor manufacturing process, comprising:

• a) conducting the semiconductor manufacturing process;
• b) monitoring one or more physical parameters of the semiconductor process;
• and
• c) transmitting data or information from a monitor configured to monitor the semiconductor process, and reading the data or information with a reader configured to receive the data or information from the monitor,
• wherein the monitor and/or reader comprises a near field communication device comprising:
• a receiver configured to convert a first near field signal to an electric signal;
• a transmitter configured to generate a second near field signal;
• a dielectric substrate within a housing;
• an antenna on said dielectric substrate, said antenna receiving said first near field signal and transmitting or broadcasting said second near field signal;
• and
• a compensating loop within said housing and coupled to said antenna.

A method of manufacturing a near field communication device, comprising:

• a) forming an antenna on a dielectric substrate, said antenna receiving a first near field signal and transmitting or broadcasting a second near field signal, and coupled to a receiver and a transmitter;
• and
• b) forming a compensating loop configured to be electromagnetically coupled to said antenna and that mitigates or counteracts an electromagnetic effect of metal on or near a surface of said dielectric substrate by a process that comprises (i) depositing a first metal layer on or over said dielectric substrate, then patterning and etching said first metal layer, or (ii) printing a metal coil or ring on said dielectric substrate;
• wherein said dielectric layer is formed on said compensating loop before said antenna is formed, and said antenna, said dielectric substrate and said compensating loop are formed or placed in a housing of the near field communication device.