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US 9,755,104 B2Granted
Method of manufacturing optoelectronic element having rough surface
AssigneeEpistar Corporation
InventorsWei Jung Chung, Chi Hao Huang
Life of this patent
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Abstract
A method of forming a rough surface includes: providing an article having a top surface, forming a plurality of agglomerated grains on the top surface by a deposition process, and patterning the top surface to form a rough surface by using the plurality of agglomerated grains as a mask.
Claims19
A method of forming a rough surface of an article, comprising:
- providing the article comprising a top surface;
- forming a plurality of seeds comprising a metal material on the top surface during an initial stage of evaporation or sputtering process;
- agglomerating the plurality of seeds into a plurality of agglomerated grains on the top surface after the initial stage of evaporation or sputtering process;
- and
- patterning the top surface to form the rough surface of the article by using the plurality of agglomerated grains as a mask,
- wherein the plurality of agglomerated grains are non-uniform in size, and
- wherein one of the plurality of seeds is different in size from one of the agglomerated grains.
4 more elements
A method of forming a rough surface of an article, comprising:
- providing the article comprising a top surface;
- forming a plurality of seeds comprising a metal material on the top surface during an initial stage of evaporation or sputtering process;
- agglomerating the plurality of seeds into a plurality of agglomerated grains on the top surface after the initial stage of evaporation or sputtering process;
- and
- patterning the top surface to form the rough surface of the article by using the plurality of agglomerated grains as a mask,
- wherein the metal material has a melting point lower than 350° C., and the evaporation or the sputtering process is controlled at a process temperature lower than the melting point.
3 more elements
A method of forming a rough surface of an article, comprising:
- providing the article comprising a top surface;
- forming a plurality of seeds comprising a metal material on the top surface during an initial stage of evaporation or sputtering process;
- agglomerating the plurality of seeds into a plurality of agglomerated grains on the top surface after the initial stage of evaporation or sputtering process;
- and
- patterning the top surface to form the rough surface of the article by using the plurality of agglomerated grains as a mask,
- wherein the plurality of agglomerated grains comprises an irregular pattern.
3 more elements
Dependencies are inferred from the claim text.