A method for processing a precursor of a heterojunction photovoltaic cell, the precursor comprising at least one layer of doped crystalline silicon and a layer of doped amorphous semiconductor material, the method comprising:
- placing the cell precursor sandwiched between a grounded conducting plate and a plate made of insulating material coated with a conducting layer;
- applying a state change electrical voltage between the conducting layer and ground, the state change electrical voltage being designed to bring the Fermi level at an interface between crystalline silicon and amorphous semiconductor material closer to the middle of the band gap of the amorphous semiconductor material, while at the same time heating the cell precursor to a defect equilibration temperature;
- cooling down the cell precursor prior to interrupting the application of the state change electrical voltage.