High voltage device fabricated using low-voltage processes
AssigneeMicrosemi SoC Corporation
InventorsFengliang Xue, Fethi Dhaoui, John L. McCollum
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AssigneeMicrosemi SoC Corporation
InventorsFengliang Xue, Fethi Dhaoui, John L. McCollum
Estimating the term…
A method for fabricating a high-voltage transistor on a semiconductor substrate includes defining and forming shallow trench isolation regions for all of the transistors, defining and forming well regions for all of the transistors, forming a gate oxide layer in the well regions for all of the transistor, forming gates for all of the transistors over the gate oxide layer, implanting a dopant to form lightly-doped drain regions for all of the transistors, the lightly-doped drain regions for at least drains of the high-voltage transistors being spaced apart from an inner edge of the shallow trench isolation regions, forming gate spacers at sides of the gates of all of the transistors, and implanting a dopant to form sources and drains for all of the transistors, the drains of the high-voltage transistors being formed completely surrounded by the lightly-doped drain regions of the high-voltage transistors.
A method for fabricating a high-voltage transistor on a semiconductor substrate comprising:
Dependencies are inferred from the claim text.