Back to results
US 9,755,024 B2Granted
Functionalized ZnO or ZnO alloy films exhibiting high electron mobility
AssigneeWisconsin Alumni Research Foundation
InventorsPaul G. Evans, Josef W. Spalenka
Life of this patent
Estimating the term…
Abstract
Functionalized films are provided comprising a film of ZnO or ZnO alloy disposed over a supporting substrate and a layer of organic molecules comprising terminal carboxylic acid linkage groups, wherein the organic molecules are bound to a surface of the film of ZnO or ZnO alloy via the terminal carboxylic acid linkage groups. Thin film transistors comprising the functionalized films are also provided. The functionalized films may be formed using polycrystalline ZnO and saturated fatty acids, such as stearic acid.
Claims18
A functionalized film comprising:
- a film of polycrystalline ZnO or alloy thereof disposed over a supporting substrate;
- and
- a layer of organic molecules comprising terminal carboxylic acid linkage groups, wherein the organic molecules are bound to a surface of the film of polycrystalline ZnO or alloy thereof via the terminal carboxylic acid linkage groups, wherein the surface is substantially unetched during functionalization to provide the functionalized film.
A thin film transistor comprising:
- a layer of a gate material;
- a layer of a dielectric material disposed over and in contact with the layer of the gate material;
- a functionalized film disposed over and in contact with the layer of the dielectric material, the functionalized film comprising:
- a film of polycrystalline ZnO or alloy thereof, and
- a layer of organic molecules comprising terminal carboxylic acid linkage groups, wherein the organic molecules are bound to a surface of the film of polycrystalline ZnO or alloy thereof via the terminal carboxylic acid linkage groups, wherein the surface is substantially unetched during functionalization to provide the functionalized film;
- a source disposed over the layer of the dielectric material and in contact with the functionalized film at a first interface;
- and
- a drain disposed over the layer of the dielectric material and in contact with the functionalized film at a second interface.
5 more elements
Dependencies are inferred from the claim text.