Solid-state imaging device
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorTowa Takahashi
Life of this patent
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Abstract
A solid-state imaging device includes unit pixels arrayed two dimensionally in a pixel area, wherein: a unit pixel disposed in a central region of the pixel area includes a first collecting element having a convex surface and a unit pixel in a region of the pixel area not including the central region includes a second collecting element having a convex surface and grooves having widths less than or equal to a wavelength of incident light; the second collecting element includes a sparse region and a dense region in which a density of formations of the grooves is higher than in the sparse region; and the sparse region is positioned closer to the central region of the pixel area than the dense region.
Claims13
A solid-state imaging device comprising
- unit pixels arrayed two-dimensionally in a pixel area of a substrate,
- the unit pixels including, in one-to-one correspondence:
- photoelectric converters;
- and
- collecting elements which collect incident light, the collecting elements including:
- a first collecting element having a convex surface, the first collecting element being formed in a unit pixel disposed in a central region of the pixel area among the unit pixels;
- and
- a second collecting element having a convex surface and grooves having widths less than or equal to a wavelength of the incident light, the second collecting element being formed in a unit pixel disposed in a region of the pixel area not including the central region, among the unit pixels, wherein
- the second collecting element has, in plan view of the substrate:
- a sparse region;
- and a dense region in which a density of formations of the grooves is higher than the density of formations of the grooves in the sparse region, and
- the sparse region of the second collecting element is positioned closer to the central region of the pixel area than the dense region of the second collecting element is.
The solid-state imaging device according to claim
- among the unit pixels, the density of formations of the grooves in a unit pixel at a first distance from the central region of the pixel area is higher than the density of formations of the grooves in a unit pixel at a second distance from the central region of the pixel area, the first distance being greater than the second distance.
Dependencies are inferred from the claim text.