Non-volatile memory device
AssigneeToshiba Memory Corporation
InventorsMasaaki Higuchi, Katsuyuki Sekine, Fumiki Aiso, Takuo Ohashi, Tatsuya Okamoto
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AssigneeToshiba Memory Corporation
InventorsMasaaki Higuchi, Katsuyuki Sekine, Fumiki Aiso, Takuo Ohashi, Tatsuya Okamoto
Estimating the term…
According to one embodiment, a non-volatile memory device includes a plurality of electrodes, at least one semiconductor layer, conductive layers, and first and second insulating films. The electrodes are arranged side by side in a first direction. The semiconductor layer extends into the electrodes in the first direction. The conductive layers are provided between each electrode and the semiconductor layer and separated from each other in the first direction. The first insulating film contacts the conductive layers, and extends in the first direction along the semiconductor layer between the conductive layers and the semiconductor layer. The second insulating film is provided between the first insulating film and the semiconductor layer. The first insulating film includes a first portion located between the conductive layers and the second insulating film, and a second portion located between the interlayer insulating film and the second insulating film.
A non-volatile semiconductor storage device, comprising:
Dependencies are inferred from the claim text.