Method of operating an integrated switchable capacitive device
AssigneeSTMicroelectronics (Rousset) SAS
InventorsPascal Fornara, Christian Rivero
Life of this patent
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Abstract
A variable capacitor includes a fixed main capacitor electrode disposed in a first metal layer overlying a substrate, a second main capacitor electrode spaced from the fixed main capacitor electrode, and a movable capacitor electrode disposed in the first metal layer adjacent the fixed main capacitor electrode. The movable capacitor electrode can be caused to be in a first position ohmically electrically connected to the fixed main capacitor electrode such that the variable capacitor has a first capacitance value or in a second position spaced from the fixed main capacitor electrode such that the variable capacitor has a second capacitance value.
Claims20
An integrated circuit, comprising:
- an accommodation;
- and
- a variable capacitor disposed, at least partially, within the accommodation, the variable capacitor, comprising:
- a first capacitor electrode disposed in a first interconnect layer overlying a substrate;
- a second capacitor electrode disposed in a second interconnect layer overlying the first capacitor electrode;
- and
- a movable capacitor electrode coupled to a wall defining the accommodation, the movable capacitor electrode being adjacent to the first capacitor electrode, the movable capacitor electrode being switchable between a first configuration and a second configuration, wherein the movable capacitor electrode is ohmically coupled to the first capacitor electrode in the first configuration and capacitively coupled to the first capacitor electrode in the second configuration.
An integrated circuit, comprising:
- a movable electrode disposed in a first metal layer;
- a fixed capacitor having a first plate disposed in the first metal layer and a second plate disposed in a second metal layer overlying the first metal layer, wherein a first sidewall of the movable electrode is directed toward and spaced apart from the first plate;
- and
- an actuator, wherein a second sidewall of the movable electrode is directed toward and spaced apart from the actuator, wherein the movable electrode is configured to switch between a first position and a second position in response to an electrostatic field generated by the actuator.
An integrated circuit, comprising:
- a switchable capacitor comprising:
- a first capacitor comprising a first electrode and a second electrode overlying the first electrode;
- and
- a third electrode adjacent to the first electrode, wherein the third electrode is configured to be resistively connected to the first electrode in a first configuration such that the switchable capacitor has a first capacitance value, and wherein the third electrode is configured to be capacitively connected to the first electrode in a second configuration such that the switchable capacitor has a second capacitance value different from the first capacitance value.
Dependencies are inferred from the claim text.