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US 9,754,873 B2Granted
Storage device with contacts contacting different wiring layers and manufacturing method thereof
AssigneeToshiba Memory Corporation
InventorYusuke Kobayashi
Life of this patent
Estimating the term…
Abstract
A storage device includes a first wiring layer, a second wiring layer above the first wiring layer, a third wiring layer above the second wiring layer, a first contact in electrical contact with the first and third wiring layers and electrically insulated from the second wiring layer, a second contact in electrical contact with the first and second wiring layers and electrically insulated from the third wiring layer, and an insulating layer in contact with the second contact and above the third wiring layer, the first contact, and the second contact.
Claims19
A storage device comprising:
- a first wiring layer;
- a second wiring layer above the first wiring layer;
- a third wiring layer above the second wiring layer;
- a first contact in electrical contact with the first and third wiring layers and electrically insulated from the second wiring layer;
- a second contact in electrical contact with the first and second wiring layers and electrically insulated from the third wiring layer;
- and
- an insulating layer provided on an upper surface of the second contact and the third wiring layer
- wherein an upper surface of the first contact is higher than the upper surface of the second contact, and the upper surface of the second contact is higher than an upper surface of the second wiring layer.
5 more elements
A storage device comprising:
- a first wiring layer;
- a second wiring layer above the first wiring layer in a first direction;
- a third wiring layer above the second wiring layer in the first direction;
- a first contact extending in the first direction from the first wiring layer to the third wiring layer and electrically connecting the first and third wiring layers, the first contact electrically insulated from the second wiring layer;
- a second contact extending in the first direction from the first wiring layer to the second wiring layer and electrically connecting the first and second wiring layers, the second contact electrically insulated from the third wiring layer;
- and
- an insulating layer directly contacting an upper surface of the second contact and the third wiring layer,
- wherein an upper surface of the first contact is higher than the upper surface of the second contact in the first direction.
5 more elements
Dependencies are inferred from the claim text.