Method for the production of a wafer with a carrier unit
AssigneeSiltectra GmbH
InventorLukas Lichtensteiger
Life of this patent
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AssigneeSiltectra GmbH
InventorLukas Lichtensteiger
Estimating the term…
The invention relates to a method for the production of layers of solid material, in particular for use as wafers, comprising the following steps: providing a workpiece for the separation of layers of solid material, the workpiece having at least one exposed surface, producing and/or providing a carrier unit for receiving at least one layer of solid material, the carrier unit being made in a number of layers, the carrier unit having a stabilisation layer and the stabilisation layer being overlapped at least partially by a receiving layer, the receiving layer being made to hold the layer of solid material, and the stabilisation layer being formed, at least partially, such that it has an E modulus that is greater than the E modulus of the receiving layer, connecting the receiving layer to the exposed surface of the workpiece, thus forming a composite structure, exposing the composite structure to an inner and/or outer stress field such that the layer of solid material is separated along a plane of the workpiece extending within the workpiece.
A method for producing layers of solid material as wafers comprising:
A system for producing layers of solid material as wafers, the system being operable for:
A wafer produced by the process of:
Dependencies are inferred from the claim text.