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US 9,754,772 B2Granted
Charged particle image measuring device and imaging mass spectrometry apparatus
AssigneeCanon Kabushiki Kaisha
InventorsKota Iwasaki, Hiroyuki Hashimoto
Life of this patent
Estimating the term…
Abstract
A charged particle image measuring device includes a sample stage, a charged particle lens opposite the sample stage, a two-dimensional detector, a first diaphragm disposed between the sample stage and a position of a crossover that is formed by the charged particle lens and that is closest to a sample, and a second diaphragm disposed between the first diaphragm and the two-dimensional detector.
Claims15
A charged particle image measuring device comprising:
- a sample stage;
- a charged particle lens opposite the sample stage;
- a two-dimensional detector;
- a first diaphragm disposed between the sample stage and a position of a crossover that is formed by the charged particle lens and that is closest to a sample;
- and
- a second diaphragm disposed between the first diaphragm and the two-dimensional detector.
3 more elements
A charged particle image measuring device comprising:
- a sample stage configured to hold a sample;
- a two-dimensional detector;
- a charged particle lens disposed opposite the sample stage and configured to converge charged particles emitted from the sample and to form an image of the charged particles emitted from the sample on the two-dimensional detector;
- a first diaphragm disposed between the sample stage and a position of a crossover that is formed by the charged particle lens and that is closest to the sample and configured to block at least some of the charged particles emitted from the sample;
- and
- a second diaphragm disposed between the first diaphragm and the two-dimensional detector and configured to block at least some of the charged particles passing through the first diaphragm.
3 more elements
Dependencies are inferred from the claim text.