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US 9,754,771 B2Granted
Encapsulated magnetron
AssigneeApplied Materials, Inc.
InventorsBrian T. West, Roger M. Johnson, Michael S. Cox
Life of this patent
Estimating the term…
Abstract
Embodiments of the present invention generally provide a magnetron that is encapsulated by a material that is tolerant of heat and water. In one embodiment, the entire magnetron is encapsulated. In another embodiment, the magnetron includes magnetic pole pieces, and the magnetic pole pieces are not covered by the encapsulating material.
Claims14
A magnetron, comprising:
- a plurality of magnets, wherein each magnet of the plurality of magnets has a first end and a second end;
- a first magnetic pole piece, wherein the first magnetic pole piece is coupled to each first end of each magnet;
- a second magnetic pole piece, wherein the second magnetic pole piece is coupled to each second end of each magnet;
- a first encapsulating material covering the plurality of magnets;
- a second encapsulating material disposed in a gap between the first magnetic pole piece and the second magnetic pole piece;
- and
- a plurality of ridges disposed on the second encapsulating material.
4 more elements
A magnetron, comprising:
- a plurality of magnets, wherein each magnet of the plurality of magnets has a first end and a second end;
- a backing plate, wherein the backing plate is coupled to each first end of each magnet;
- a first magnetic pole piece, wherein the first magnetic pole piece is coupled to each second end of each magnet;
- a first encapsulating material covering the plurality of magnets;
- a second encapsulating material disposed in a gap between the first magnetic pole piece and a second magnetic pole piece;
- and
- a plurality of ridges disposed on the second encapsulating material.
4 more elements
A magnetron, comprising:
- a backing plate;
- a first magnetic pole piece;
- a second magnetic pole piece;
- a plurality of magnets disposed between the backing plate and the first magnetic pole piece;
- a first encapsulating material covering the plurality of magnets;
- a second encapsulating material disposed in a gap between the first magnetic pole piece and the second magnetic pole piece;
- and
- a plurality of ridges disposed on the second encapsulating material.
5 more elements
Dependencies are inferred from the claim text.