Plasma processing apparatus

A plasma processing apparatus, including an external circuit of a power meter or a signal meter electrically connected via a line to an electrical member within a processing vessel in which a plasma process is performed, configured to reduce or block a high frequency noise of a predetermined frequency introduced from the electrical member into the line toward the external circuit by a filter provided on the line,

• wherein the filter comprises:
• a single solenoid coil which forms a part of the line and has a first section and a second section having independent winding pitches;
• a cylindrical outer conductor, accommodating or surrounding the solenoid coil, configured to form, by being combined with the solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies;
• first comb teeth which are made of an insulating material and inserted into winding gaps of the solenoid coil in the first section locally in a circumferential direction thereof such that only an outer side surface and a part of upper and lower surfaces of the solenoid coil are covered with the first comb teeth;
• and
• a second coil tube which is made of an insulating material and configured to block winding gaps of the solenoid coil entirely in the circumferential direction thereof.

A plasma processing apparatus, including an external circuit of a power meter or a signal meter electrically connected via a line to an electrical member within a processing vessel in which a plasma process is performed, configured to reduce or block a high frequency noise of a predetermined frequency introduced from the electrical member into the line toward the external circuit by a filter provided on the line,

• wherein the filter comprises:
• a single solenoid coil forming a part of the line;
• and
• a cylindrical outer conductor, accommodating or surrounding the solenoid coil, configured to form, by being combined with the solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies,
• wherein the solenoid coil has a first section and a second section having different winding pitches in an axis direction thereof,
• the winding pitch of the first section is equal to or larger than twice the winding pitch of the second section, or equal to or less than ½ the winding pitch of the second section,
• the filter has, in the first section, first comb teeth which are made of an insulating material and inserted in winding gaps of the solenoid coil locally at plural positions in a circumferential direction thereof, and
• the first comb teeth are formed on an outer surface of a rod-shaped member composed of a plurality of insulating members which are extended in parallel to the solenoid coil in the coil axis direction and, also, arranged adjacent to an inner peripheral surface of the solenoid coil.

A plasma processing apparatus, including an external circuit of a power meter or a signal meter electrically connected via a line to an electrical member within a processing vessel in which a plasma process is performed, configured to reduce or block a high frequency noise of a predetermined frequency introduced from the electrical member into the line toward the external circuit by a filter provided on the line,

• wherein the filter comprises:
• a single solenoid coil forming a part of the line;
• and
• a cylindrical outer conductor, accommodating or surrounding the solenoid coil, configured to form, by being combined with the solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies,
• wherein the solenoid coil has a first section and a second section having different winding pitches in an axis direction thereof,
• the winding pitch of the first section is equal to or larger than twice the winding pitch of the second section, or equal to or less than ½ the winding pitch of the second section,
• the filter has, in the first section, first comb teeth which are made of an insulating material and inserted in winding gaps of the solenoid coil locally at plural positions in a circumferential direction thereof, and
• the first comb teeth are formed on an outer end surface of a plate-shaped member formed of a plurality of insulating members provided within the solenoid coil, and the insulating members are extended in a radial direction of the solenoid coil to come into contact with an inner peripheral surface of the solenoid coil and, also, extended in parallel to the solenoid coil in the coil axis direction.

A plasma processing apparatus, including an external circuit of a power meter or a signal meter electrically connected via a line to an electrical member within a processing vessel in which a plasma process is performed, configured to reduce or block a high frequency noise of a predetermined frequency introduced from the electrical member into the line toward the external circuit by a filter provided on the line,

• wherein the filter comprises:
• a single solenoid coil forming a part of the line;
• and
• a cylindrical outer conductor, accommodating or surrounding the solenoid coil, configured to form, by being combined with the solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies,
• wherein the solenoid coil has a first section and a second section in which coil conductors are respectively insulation-coated with a first coil tube and a second coil tube having different dielectric constants.