Electron microscope
AssigneeHitachi High-Technologies Corporation
InventorsToshiyuki Oyagi, Takafumi Yotsuji
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Abstract
Provided is an electron microscope wherein a detector requiring the application of a voltage is used to obtain a micrograph from a sample placed in a gas atmosphere. The electron microscope is provided with a gas inlet device for emitting gas onto a sample, and a gas control device controlling the amount of gas emitted by the gas inlet device so that, during the gas emission by the gas inlet device, the degree of vacuum within the space where the detector (49-51, 55) is installed is continuously maintained to less than a set value.
Claims5
An electron microscope that includes an electron source for irradiation of a sample with an electron beam;
- and a detector for detecting an electron generated from the sample by irradiation with the electron beam, and generates an image of the sample based on an output from the detector,
- the electron microscope comprising:
- a gas inlet portion for introducing a gas to the sample;
- a display section for displaying the generated image;
- and
- a control unit for controlling the gas inlet portion,
- wherein a plurality of the detectors are provided,
- the display section simultaneously saves and plays back, as a plurality of moving images, a plurality of images generated based on outputs from the plural detectors, and
- an arbitrary shape on the moving image is specified so as to trace the shape by image correlation and a movement trajectory of the shape is displayed.
An electron microscope that includes an electron source for irradiation of a sample with an electron beam;
- and a detector for detecting an electron generated from the sample by irradiation with the electron beam, and generates an image of the sample based on an output from the detector,
- the electron microscope comprising:
- a gas inlet portion for introducing a gas to the sample;
- a display section for displaying the generated image;
- and
- a control unit for controlling the gas inlet portion,
- wherein a plurality of the detectors are provided,
- the display section simultaneously displays a plurality of images generated based on outputs from the plural detectors, and
- an arbitrary shape on the image is specified so as to trace the shape by image correlation and a movement trajectory of the shape is displayed.
Dependencies are inferred from the claim text.