US 9,754,762 B2Granted

Electron microscope and sample observation method

AssigneeHitachi High-Technologies Corporation

InventorsToshie Yaguchi, Hiroyuki Kobayashi, Takafumi Yotsuji

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Abstract

Provided are a device and a method allowing a crystal orientation to be adjusted with adequate throughput and high precision to observe a sample, regardless of the type of the sample or the crystal orientation. In the present invention, the method comprises: setting a fitting circular pattern (26) displayed overlaid so that a main spot (23) is positioned on the circumference thereof, on the basis of the diffraction spot brightness distribution in an electron diffraction pattern (22b) displayed on a display unit (13); setting a vector (28) displayed with the starting point at the center position (27) of the displayed circular pattern (26), and the end point at the location of the main spot (23) positioned on the circumference of the circular pattern (26); and adjusting the crystal orientation on the basis of the orientation and the magnitude of the displayed vector (28).

Claims9

Dependent claims

An electron microscope comprising:

an electron source with electron beams which irradiate a sample;
a sample stage which holds the sample;
a driving unit which drives the sample stage;
a detecting unit which acquires a signal which is obtained from the sample by irradiation of the electron beams and detects a sample image;
a display unit which displays an electron beam diffraction image of the sample;
and
a control unit,
wherein the control unit has
a pattern setting unit that sets a circular pattern for fitting which is displayed overlaid so that a main spot is positioned on a circumference thereof, based on a diffraction spot brightness distribution in an electron beam diffraction pattern displayed on a display unit, and
a vector setting unit which sets a vector displayed with a starting point at a center position of the displayed circular pattern, and an end point at a location of the main spot positioned on the circumference of the circular pattern, and
wherein the control unit controls the driving unit so as to tilt the sample based on an orientation and magnitude of the displayed vector.

8 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/322,659Filed 8 Jun 2015
Priority: JP 2014-1392737 Jul 2014
Published: US 2017/0133195 A111 May 2017
Granted: 5 Sep 2017
Term ends: Not estimatedThe source records don’t support an estimate.

Classification8 codes

H01J 37/22
Details: optical , image processing or photographic arrangements associated with the tube
H01J 37/20
Details: means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
H01J 37/244
Details: detectors; Associated components or circuits therefor
H01J 37/28
Electron or ion microscopes; Electron or ion diffraction tubes: with scanning beams