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US 9,754,760 B2Granted
Charged particle source
AssigneeHermes Microvision, Inc.
InventorShuai Li
Life of this patent
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Abstract
This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.
Claims4
An electron beam inspection tool, comprising:
- an electron source for providing an electron beam;
- an auxiliary lens for condensing the electron beam;
- an objective lens for focusing the electron beam on a sample;
- a scanning unit for scanning the electron beam on the sample;
- a detector for receiving signal electrons emanated from the sample;
- and
- a condenser lens system, comprising:
- a first magnetic lens above an electron source;
- and
- a second magnetic electron source below the electron source,
- wherein when a first magnetic field generated by the first magnetic lens is anti-symmetric to a second magnetic field generated by said second magnetic lens at a tip of the electron source, a compound magnetic field superposed by the first and second magnetic field is weakest at the tip and largest immediately long an optical axis of the electron source, and the compound magnetic field provides a high resolution mode,
- wherein when the first magnetic field generated by the first magnetic lens is symmetric to the second magnetic field generated by the second magnetic lens at the tip of the electron source, the compound magnetic field superposed by the first and second magnetic field is largest at the tip of the electron source, and the compound magnetic field provides a high throughput mode.
9 more elements
Dependencies are inferred from the claim text.