# US 9,753,381 B2 · Substrate table system, lithographic apparatus and substrate table swapping method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,753,381 B2 - Document ID: US9753381B2 - Status: Granted - Kind: B2 - Application number: 14/388,773 - Filed: 2013-02-15 - Published: 2015-06-04 - Granted: 2017-09-05 - Earliest claimed: 2012-03-27 - Assignees: ASML Netherlands B.V. - Applicants: ASML Netherlands B.V. - Inventors: Bastiaan Lambertus Wilhelmus Marinus Van De Ven; Antonius Franciscus Johannes De Groot; Christiaan Alexander Hoogendam; Erik Roelof Loopstra; Hans Butler - Web page: https://patentgrep.com/patent/US9753381B2 ## CPC - G03F 7/70758: {Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving} - G03F 7/70716: {Stages} - G03F 7/70725: {control} - G03F 7/70733: {Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask} - G03F 9/70: {for microlithography (measuring printed patterns for monitoring overlay G03F7/70633 or focus G03F7/70641; projection system adjustment G03F7/70258; position control G03F7/70775)} - H02K 41/02: Linear motors; Sectional motors - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H02K: DYNAMO-ELECTRIC MACHINES (dynamo-electric relays H01H53/00; conversion of DC or AC input power into surge output power {H03K3/53}) ## Abstract A substrate table system includes a substrate table and a dual directional motor for moving the substrate table in a plane of movement that is defined by a first direction and a second direction. The dual directional motor includes: a first pusher structure extending in the first direction, the substrate table being movable in respect of the first pusher structure, the first pusher structure and the substrate table being arranged to cooperate to form a first motor to exert a force between the first pusher structure and the substrate table in the first direction; and a second pusher structure extending in the first direction, the substrate table being movable in respect of the second pusher structure, the second pusher structure and the substrate table to cooperate to form a second motor to exert a force between the second pusher structure and the substrate table in the second direction. ## Claims ### Claim 1 A substrate table system comprising a substrate table and a dual directional motor for moving the substrate table in a plane of movement, the horizontal plane of movement being defined by a first direction and a second direction perpendicular to the first direction, the dual directional motor comprising: a first pusher structure extending in the first direction, the substrate table being movable with respect to the first pusher structure, the first pusher structure and the substrate table being arranged to cooperate so as to form a first motor arranged to exert a force between the first pusher structure and the substrate table in the first direction; and a second pusher structure extending in the first direction, the substrate table being movable with respect to the second pusher structure along the first and second directions, the second pusher structure and the substrate table being arranged to cooperate so as to form a second motor arranged to exert a force between the second pusher structure and the substrate table in the second direction, wherein the first and second pusher structures are movably connected to a frame, wherein the first pusher structure is movable with respect to the frame along the second direction, and wherein the frame comprises two parallel guiding structures extending along the second direction, the first pusher structure extending along the first direction from one of the guiding structures to a location that is substantially at a center between the guiding structures. ### Claim 2 (depends on 1) The substrate table system according to claim 1, wherein the substrate table is provided with an opening, extending along the first direction, for accommodating at least part of the first pusher structure. ### Claim 3 (depends on 1) The substrate table system according to claim 1, wherein the second pusher structure extends along the first direction from the one of the guiding frames to the other of the guiding frames. ### Claim 4 (depends on 1) The substrate table system according to claim 1, wherein a part of the first motor comprised in the first pusher structure substantially extends in the first direction along a length of the first pusher structure. ### Claim 5 (depends on 1) The substrate table system according to claim 1, wherein a part of the second motor comprised in the second pusher structure extends in the first direction along at least a same length as the length of the part of the first motor extending along the first pusher structure. ### Claim 6 (depends on 1) The substrate table system according to claim 1, wherein the first and second motor are each formed by magnets comprised in the first and the second pusher structure respectively, and coils comprised in the substrate table. ### Claim 7 A lithographic apparatus, comprising two substrate table systems, each of the two substrate table systems comprising a substrate table and a dual directional motor for moving the substrate table in a plane of movement, the horizontal plane of movement being defined by a first direction and a second direction perpendicular to the first direction, the dual directional motor comprising a first pusher structure extending in the first direction, the substrate table being movable with respect to the first pusher structure, the first pusher structure and the substrate table being arranged to cooperate so as to form a first motor arranged to exert a force between the first pusher structure and the substrate table in the first direction; and a second pusher structure extending in the first direction, the substrate table being movable with respect to the second pusher structure along the first and second directions, the second pusher structure and the substrate table being arranged to cooperate so as to form a second motor arranged to exert a force between the second pusher structure and the substrate table in the second direction, wherein the first and second pusher structures are movably connected to a frame, and wherein the first pusher structure is movable with respect to the frame along the second direction, wherein the substrate tables of the two substrate table systems are arranged between the second pusher structures of the substrate table systems. ### Claim 8 (depends on 7) The lithographic apparatus according to claim 7, wherein seen along the second direction, the first pusher structures are arranged symmetrically around a center crash pole. ### Claim 9 (depends on 7) The lithographic apparatus according to claim 7, wherein the substrate tables each comprise a respective part of the second motor at a side of the substrate table facing its second pusher structure, as well as a side of the substrate table facing the other second pusher structure. ### Claim 10 (depends on 7) The lithographic apparatus according to claim 7, being arranged to swap the substrate tables of the substrate table systems by positioning one of the substrate tables under a projection system of the lithographic apparatus, positioning the other one of the substrate tables in the first direction adjacent the first substrate table; synchronously moving the first and second substrate tables in the first direction to a position wherein the other one of the substrate tables is positioned under the projection system, establishing for each substrate table, a connection between the respective substrate table and the second pusher structure of the other substrate table system, releasing for each substrate table, a connection between the respective substrate table and the second pusher structure to which it was connected before the swap. ### Claim 11 (depends on 9) A method of swapping a substrate table in a dual stage lithographic apparatus according to claim 9 comprising a measurement area and an exposure area, a border between the measurement area and the exposure area extending in a first direction, the method comprising: positioning one of the substrate tables of the two substrate table systems under a projection system of the lithographic apparatus, moving the other one of the substrate tables of the two substrate table systems from the measurement area to the exposure area, and positioning the other one of the substrate tables of the two substrate table systems in the first direction adjacent the first substrate table; synchronously moving the substrate tables of the two substrate table systems in the first direction to a position wherein the other one of the substrate tables of the two substrate table systems is positioned under the projection system, moving the one of the substrate tables of the two substrate table systems from the exposure area to the measurement area.