# US 9,753,266 B2 · Method for detecting and controlling supply of an immersion medium > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,753,266 B2 - Document ID: US9753266B2 - Status: Granted - Kind: B2 - Application number: 14/319,246 - Filed: 2014-06-30 - Published: 2015-01-15 - Granted: 2017-09-05 - Earliest claimed: 2013-07-11 - Assignees: Carl Zeiss Microscopy GmbH - Applicants: Carl Zeiss Microscopy GmbH - Inventors: Ralf Steinmeyer; Reiner Mitzkus; Timo Rojahn - Web page: https://patentgrep.com/patent/US9753266B2 ## CPC - G02B 21/241: {Devices for focusing (focusing in general G02B7/28)} - G02B 21/245: {using auxiliary sources, detectors} - G02B 21/33: Immersion oils {, or microscope systems or objectives for use with immersion fluids} - G02B 21/244: {using image analysis techniques} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract A method for detecting and controlling supply of an immersion medium into an immersion film region between the front lens of a microscope objective and a preparation, particularly in automated microscopes, using a light source which is reflected into the microscope beam path by means of a beam splitter. The state of the immersion film region is recorded and evaluated in a detection unit of the microscope or a detection unit of the autofocus device through an autofocus signal of the light source and/or a reflection of a modulation object arranged in the intermediate image plane of an incident light illumination, and is transmitted to a control unit for the purpose of a change or an error treatment of the immersion process. ## Claims ### Claim 1 A method for detecting and controlling a supply of a liquid immersion medium into an immersion film region disposed between a front lens of a microscope objective of a microscope having an autofocus device and a preparation being examined with the microscope, by using a light source reflected into a microscope beam path of the microscope with a beam splitter, the method comprising recording and evaluating a state of the immersion film region with a detection unit of the microscope or a detection unit of the autofocus device, using an autofocus signal of the light source or a reflection of a modulation object arranged in an intermediate image plane of an incident light illumination source, the method including: focusing the microscope without the immersion medium between the front lens and the preparation; recording the autofocus signal as back reflection from the autofocus device or recording the reflection of the modulation object arranged in the intermediate image plane of the incident light illumination using one of the detection units; supplying immersion medium into the immersion film region; recording and detecting an altered intensity of the autofocus signal as back reflection or a change of the optical path length between the front lens and a reflecting boundary of the immersion film region, or recording and detecting the altered intensity or sharpness of the reflection from the modulation object in order to determine a state of the immersion film region: communicating the state of the immersion film region to a control unit; and using the control unit, changing a characteristic of the supply of the immersion medium based on the state of the immersion film region. ### Claim 2 (depends on 1) The method of claim 1, wherein the method includes altering the supply of the immersion medium based on scaling or intensity of the autofocus signal or path length change of the autofocus signal, or intensity of reflection from the modulation object. ### Claim 3 (depends on 2) The method of claim 2, wherein the relative timing of a change of the supply of immersion medium into the immersion film region is adjusted on the basis of the changed autofocus signal, or the changed path length, or the changed reflection from the modulation object. ### Claim 4 (depends on 2) The method of claim 2, wherein an objective-dependent shift of the focal point of the system caused by the difference in refractive indices between air and immersion medium is corrected after the supply of the immersion medium into the immersion film region is stopped. ### Claim 5 (depends on 4) The method of claim 4, wherein software of the autofocus device readjusts the changed autofocus signal from the immersion film region to the maximum dynamic range of the detection unit in order to operate in an immersed state after correcting the focal point. ### Claim 6 (depends on 1) The method of claim 1, wherein deviations from a normal form of the altered intensity of the autofocus signal or altered intensity of reflection from the modulation object are detected in an immersed state. ### Claim 7 (depends on 1) The method of claim 1, including determining limiting values for the autofocus signal or the reflection from the modulation object between exposure times without immersion medium and with immersion medium respectively, in the immersion medium region. ### Claim 8 (depends on 1) The method of claim 1, wherein a line grid is used as the modulation object. ### Claim 9 (depends on 1) The method of claim 1, wherein the beam splitter is used for detecting the intensity of the reflection from the modulation object, using a spectral course having a degree of reflection between 25% and 75% at the wavelength used for illuminating the modulation object, and wherein the sum of transmission and reflection is >90%. ### Claim 10 (depends on 1) The method of claim 1, wherein detection of the autofocus signal or detection of the modulation object is executed using spatial filtering and/or Fourier filtering for suppressing veiling glare.