# US 9,753,055 B2 · All-optical system responsive to motion and optical module for use in the same

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- Number: US 9,753,055 B2
- Document ID: US9753055B2
- Status: Granted
- Kind: B2
- Application number: 14/912,836
- Filed: 2013-09-25
- Published: 2016-07-14
- Granted: 2017-09-05
- Earliest claimed: 2013-09-25
- Assignees: Institut National D'Optique
- Applicants: Institut National D'Optique
- Inventors: Alex Paquet; Claude Paré; Marco Michele Sisto
- Web page: https://patentgrep.com/patent/US9753055B2

## CPC

- G01P 15/093: by photoelectric pick-up
- G01P 13/00: Indicating or recording presence, absence, or direction, of movement (electric switches H01H; counting moving objects G06M7/00)
- G01P 15/18: in two or more dimensions
- G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G})

## Abstract

An optical module for use in a motion responsive system includes a support and a proof mass mechanically coupled and displaceable relative to the support along at least one sensing axis in response to a motion experienced by the support. The module also includes an optical monitoring assembly for monitoring the proof mass with an optical beam impinging on the proof mass, the beam including a plurality of dedicated spectral components. The module further includes an optical spectral filter including a plurality of filtering regions, each being associated with a corresponding dedicated spectral component and having a spectral profile including a distinct dedicated filtering band encompassing the spectral component, such that a displacement of the proof mass along the at least one sensing axis produces, after filtering of the beam, a change in optical power of the spectral components indicative of the motion experienced by the support.

## Claims

### Claim 1

An optical module for use in a motion responsive system, the optical module comprising:
a support;
a proof mass mechanically coupled and displaceable relative to the support along at least one sensing axis in response to a motion experienced by the support;
an optical monitoring assembly fixed relative to the support for monitoring the proof mass with an optical beam impinging on the proof mass, the optical beam comprising a plurality of dedicated spectral components; and
an optical spectral filter positioned in a path of the optical beam, the optical spectral filter comprising a plurality of filtering regions, each filtering region being associated with a corresponding one of the plurality of dedicated spectral components of the optical beam and having a spectral profile comprising a distinct dedicated filtering band encompassing the corresponding dedicated spectral component, such that a displacement of the proof mass along the at least one sensing axis produces, after filtering of the optical beam by the optical spectral filter, a change in the optical power of at least one of the plurality of dedicated spectral components, the change being indicative of the motion experienced by the support.

### Claim 2 (depends on 1)

The optical module according to claim 1, wherein:
the optical spectral filter consists of a reflection filter mounted on the proof mass, the plurality of filtering regions defining a plurality of reflecting regions arranged on the proof mass and the dedicated filtering band of each filtering region defining a dedicated reflection band, such that each dedicated spectral component of the optical beam is associated with a corresponding one of the plurality of reflecting regions of the reflection filter and lies within the corresponding dedicated reflection band; and
the optical monitoring assembly comprises a light entry interface for directing the optical beam toward the optical spectral filter for reflection thereon, and a light exit interface for collecting the optical beam reflected from the optical spectral filter.

### Claim 3 (depends on 2)

The optical module according to claim 2, further comprising a light focusing element having an endface defining the light entry interface.

### Claim 4 (depends on 3)

The optical module according to claim 3, wherein the light focusing element is a graded-index lens.

### Claim 5 (depends on 1)

The optical module according to claim 1, wherein:
the optical spectral filter consists of a transmission filter, the plurality of filtering regions defining a plurality of transmitting regions and the dedicated filtering band of each filtering region defining a dedicated transmission band, such that each dedicated spectral component of the optical beam is associated with a corresponding one of the plurality of transmitting regions of the transmission filter and lies within the corresponding dedicated transmission band; and
the optical monitoring assembly comprises a light entry interface for directing the optical beam toward the proof mass, and a light exit interface for collecting the optical beam after impinging on the proof mass.

### Claim 6 (depends on 5)

The optical module according to claim 5, wherein the plurality of transmitting regions of the transmission filter are arranged on the proof mass.

### Claim 7 (depends on 6)

The optical module according to claim 6, further comprising a light focusing element having an endface defining the light entry interface, and a light collecting element having an endface defining the light exit interface.

### Claim 8 (depends on 1)

The optical module according to claim 1, wherein the optical beam comprises an additional spectral component distinct from the plurality of dedicated spectral components, and wherein the at least one sensing axis comprises a longitudinal sensing axis parallel to the path of the optical beam incident on the proof mass, the optical module further comprising:
a pair of substantially parallel surfaces facing each other and reflecting at least partially the additional spectral component of the optical beam to form a Fabry-Perot resonant cavity having a cavity length, one of the substantially parallel surfaces being a surface of the proof mass, such that a displacement of the proof mass along the longitudinal sensing axis modifies the cavity length and produces a corresponding change in the optical power of the additional spectral component, the change being indicative of the motion experienced by the support along the longitudinal sensing axis.

### Claim 9

An optical module for use in a motion responsive system, the optical module comprising:
a support;
a proof mass mechanically coupled and displaceable relative to the support along at least one sensing axis in response to a motion experienced by the support;
an optical monitoring assembly comprising a light entry interface mounted on the proof mass and a light exit interface, the optical monitoring assembly monitoring the proof mass with an optical beam projected from the light entry interface and comprising a plurality of dedicated spectral components, and
an optical spectral filter fixed with respect to the support and positioned in a path of the optical beam, the optical spectral filter comprising a plurality of filtering regions, each filtering region being associated with a corresponding one of the plurality of dedicated spectral components of the optical beam and having a spectral profile comprising a distinct dedicated filtering band encompassing the corresponding dedicated spectral component, such that a displacement of the proof mass along the at least one sensing axis produces, after filtering of the optical beam by the optical spectral filter, a change in the optical power of at least one of the plurality of dedicated spectral components, the change being indicative of the motion experienced by the support.

### Claim 10

An optical module for use in a motion responsive system, the optical module comprising:
a support;
a first proof mass mechanically coupled and displaceable relative to the support along two mutually orthogonal first and second sensing axes in response to a motion experienced by the support;
a second proof mass mechanically coupled and displaceable relative to the support along a third sensing axis in response to the motion experienced by the support, the third sensing axis being orthogonal to both the first and second sensing axes;
an optical monitoring assembly fixed relative to the support for monitoring the first and the second proof masses with corresponding first and second optical beams impinging respectively on the first and the second proof masses, the first and second optical beams comprising respectively four and two dedicated spectral components;
a first optical spectral filter positioned in a path of the first optical beam, the first optical spectral filter comprising four filtering regions, each filtering region being associated with a corresponding one of the four dedicated spectral components of the first optical beam and having a spectral profile comprising a distinct dedicated filtering band encompassing the corresponding dedicated spectral component, such that a displacement of the first proof mass along the first and second sensing axes produces, after filtering of the first optical beam by the first optical spectral filter, a change in the optical power of at least one of the four dedicated spectral components of the first optical beam, the change being indicative of the motion experienced by the support along at least one of the first and second sensing axes; and
a second optical spectral filter positioned in a path of the second optical beam, the second optical spectral filter comprising two filtering regions, each filtering region being associated with a corresponding one of the two dedicated spectral components of the second optical beam and having a spectral profile comprising a distinct dedicated filtering band encompassing the corresponding dedicated spectral component, such that a displacement of the second proof mass along the third sensing axis produces, after filtering of the second optical beam by the second optical spectral filter, a change in the optical power of at least one of the two dedicated spectral components of the second optical beam, the change being indicative of the motion experienced by the support along the third sensing axis.

### Claim 11

An optical motion responsive system comprising:
a support;
a proof mass mechanically coupled and displaceable relative to the support along at least one sensing axis in response to a motion experienced by the support;
an optical monitoring assembly comprising a light entry interface and a light exit interface, the optical monitoring assembly being fixed relative to the support for monitoring the proof mass with an optical beam impinging on the proof mass, the optical beam comprising a plurality of dedicated spectral components;
a light source assembly optically coupled to the optical monitoring assembly, the light source assembly generating the optical beam and projecting the same onto the proof mass via the light entry interface;
an optical spectral filter positioned in a path of the optical beam, the optical spectral filter comprising a plurality of filtering regions, each filtering region being associated with a corresponding one of the plurality of dedicated spectral components of the optical beam and having a spectral profile comprising a distinct dedicated filtering band encompassing the corresponding dedicated spectral component; and
an optical detector assembly for measuring an optical power of each dedicated spectral component of the optical beam after incidence of the optical beam onto the proof mass and collection of the same via the light exit interface, such that a displacement of the proof mass along the at least one sensing axis produces, after filtering of the optical beam by the optical spectral filter, a change in the optical power of at least one of the plurality of dedicated spectral components, the change being indicative of the motion experienced by the support.

### Claim 12 (depends on 11)

The optical motion responsive system according to claim 11, wherein the optical spectral filter consists of a reflection filter mounted on the proof mass, the plurality of filtering regions defining a plurality of reflecting regions arranged on the proof mass and the dedicated filtering band of each filtering region defines a dedicated reflection band, such that each dedicated spectral component of the optical beam is associated with a corresponding one of the plurality of reflecting regions of the reflection filter and lies within the corresponding dedicated reflection band.

### Claim 13 (depends on 12)

The optical motion responsive system according to claim 12, further comprising a light focusing element for receiving the optical beam from the light source assembly and for focusing the same onto the proof mass, the light focusing element having a proximal end and a distal end, the proximal end having an endface defining the light entry interface.

### Claim 14 (depends on 13)

The optical motion responsive system according to claim 13, wherein the light focusing element is a graded-index lens.

### Claim 15 (depends on 13)

The optical motion responsive system according to claim 13, further comprising at least one optical fiber optically coupling the light focusing element and the light source assembly.

### Claim 16 (depends on 11)

The optical motion responsive system according to claim 11, wherein the optical spectral filter consists of a transmission filter, the plurality of filtering regions defining a plurality of transmitting regions and the dedicated filtering band of each filtering region defining a dedicated transmission band, such that each dedicated spectral component of the optical beam is associated with a corresponding one of the plurality of transmitting regions of the transmission filter and lies within the corresponding dedicated transmission band.

### Claim 17 (depends on 16)

The optical motion responsive system according to claim 16, wherein the plurality of transmitting regions of the transmission filter are arranged on the proof mass.

### Claim 18 (depends on 17)

The optical motion responsive system according to claim 17, further comprising:
a light focusing element for receiving the optical beam from the light source assembly and for focusing the same onto the proof mass, the light focusing element having a proximal end and a distal end, the proximal end having an endface defining the light entry interface; and
a light collecting element for collecting the optical beam after transmission through the proof mass and for directing the same toward the optical detector assembly, the light collecting element having a proximal end and a distal end, the proximal end having an endface defining the light exit interface.

### Claim 19 (depends on 18)

The optical motion responsive system according to claim 18, wherein the light focusing element is a graded-index lens and the light collecting element is an optical fiber.

### Claim 20 (depends on 11)

The optical motion responsive system according to claim 11, wherein the light source assembly comprises:
a plurality of light sources, each light source generating a corresponding one of the plurality of dedicated spectral components; and
an optical coupler for coupling together the dedicated spectral components from the plurality of light sources to form the optical beam.