# US 9,753,027 B2 · Cantilever sensor with slit and biosensor having the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,753,027 B2 - Document ID: US9753027B2 - Status: Granted - Kind: B2 - Application number: 14/575,129 - Filed: 2014-12-18 - Published: 2015-09-10 - Granted: 2017-09-05 - Earliest claimed: 2014-03-05 - Assignees: Korea Institute of Science and Technology - Applicants: Korea Institute of Science and Technology - Inventors: Kyoseon Hwang; Tae Song Kim; Rhokyun Kwak; Won Woo Cho; Myung Sic Chae - Web page: https://patentgrep.com/patent/US9753027B2 ## CPC - G01N 33/5302: {Apparatus specially adapted for immunological test procedures} - G01N 29/022: {Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices (microdevices per se B81B)} - G01N 29/036: by measuring frequency or resonance of acoustic waves - G01N 33/54373: {involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings} - G01N 33/5438: {Electrodes} - G01N 2291/0427: Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract The present disclosure relates to a cantilever sensor, and a biosensor having the same, wherein the cantilever sensor including a slit formed on a flat board and a cantilever formed by the slit, a first electrode formed on the cantilever, and a second electrode formed on the flat board countered to the first electrode about the slit, wherein the electrodes are formed on the cantilever sensor having the slit, whereby sensing can be conducted by an electric method, through which the sensor can be effectively miniaturized. ## Claims ### Claim 1 A cantilever sensor, the cantilever sensor comprising: a flat board comprising a cantilever portion, the cantilever portion comprising a free end and a fixed end connected to a remaining portion of the flat board, and a slit formed in the flat board, wherein the slit is disposed around a perimeter of the cantilever portion, and a width of the slit from a perimeter of the cantilever portion to the remaining portion of the flat board is constant; a first electrode pair formed on the cantilever portion, wherein the first electrode pair comprises two electrodes formed, in a length-wise direction, along the cantilever portion from the fixed end of the cantilever portion to the free end of the cantilever portion, and each of the two electrodes is formed on a same surface of the cantilever portion; and a second electrode pair, wherein each electrode of the second electrode pair is formed on the remaining portion of the flat board opposite from each electrode of the first electrode pair, respectively. ### Claim 2 (depends on 1) The cantilever sensor of claim 1, wherein the electrodes of the first electrode pair are formed on a position axially symmetrical to the cantilever portion. ### Claim 3 (depends on 1) The cantilever sensor of claim 1, wherein the second electrode pair has a shape in contact with the slit and is formed opposite at least one surface of the first electrode pair. ### Claim 4 (depends on 1) The cantilever sensor of claim 1, wherein the second electrode pair includes a portion disposed on the opposite side of the slit from the free end of the cantilever portion, and another portion otherwise disposed on the opposite side of the slit from a length-wise segment of the cantilever portion. ### Claim 5 (depends on 1) The cantilever sensor of claim 1, further comprising: a piezoelectric actuating layer formed around the cantilever portion. ### Claim 6 (depends on 5) The cantilever sensor of claim 5, wherein the piezoelectric actuating layer includes: a piezoelectric film, and upper and bottom electrodes formed respectively at an upper surface and a bottom surface of the piezoelectric actuating layer. ### Claim 7 (depends on 5) The cantilever sensor of claim 5, wherein the piezoelectric actuating layer has a width greater than that of the cantilever portion. ### Claim 8 (depends on 5) The cantilever sensor of claim 5, wherein the piezoelectric actuating layer is formed at an adjacent side of the fixed end of the cantilever portion. ### Claim 9 (depends on 8) The cantilever sensor of claim 8, further comprising: an electrode line formed between the piezoelectric actuating layer and the fixed end of the cantilever portion, and connected to the first electrode pair. ### Claim 10 (depends on 1) The cantilever sensor of claim 1, wherein the two electrodes of the first electrode pair are formed parallel to each other on opposite sides of the cantilever portion. ### Claim 11 A biosensor comprising: a flat board comprising a cantilever portion, the cantilever portion comprising a free end and a fixed end connected to a remaining portion of the flat board, and a slit formed in the flat board, wherein the slit is disposed around a perimeter of the cantilever portion, and a width of the slit from a perimeter of the cantilever portion to the remaining portion of the flat board is constant; a first electrode pair formed on the cantilever portion, wherein the first electrode pair comprises two electrodes formed, in a length-wise direction, along the cantilever portion from the fixed end of the cantilever portion to the free end of the cantilever portion, and each of the two electrodes is formed on a same surface of the cantilever portion; and a second electrode pair, wherein each electrode of the second electrode pair is formed on the remaining portion of the flat board opposite from each electrode of the first electrode pair, respectively; and a target material bonding material formed on the cantilever portion. ### Claim 12 (depends on 11) The biosensor of claim 11, further comprising: a gold (Au) thin film layer formed on an entire area, or a partial area, of the first electrode fair on the cantilever portion, and bonded with the target material bonding material. ### Claim 13 (depends on 11) The biosensor of claim 11, further comprising: a channel configured to transfer a liquid sample included with a target material to one side of the cantilever portion. ### Claim 14 (depends on 11) The biosensor of claim 11, wherein the two electrodes of the first electrode pair are formed parallel to each other on opposite sides of the cantilever portion.