Nanoindenter ultrasonic probe tip
AssigneeNanometronix LLC
InventorAntanas Daugela
Life of this patent
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Abstract
A multimode ultrasonic probe tip and transducer integrated into a micro tool, such as a nano indenter or a nano indenter interfaced with a Scanning Probe Microscope (SPM) is described. The tip component may be utilized to determine mechanical properties or characteristics of a sample, including for example, complex elastic modulus, hardness, friction coefficient, and strain and stress at nanometer scales and high frequencies. The tip component is configured to operate at multi-resonant frequencies providing sub-nanometer vertical resolution. The tip component may be quasi-statistically calibrated and contact mechanics constitutive equations may be utilized to derive mechanical properties of a sample. Contact mechanical impedance and acoustic impedance may also be compared.
Claims24
An ultrasonic tip system for metrology and topology tools, comprising:
- a probe tip including an ultrasonic transducer that directs ultrasonic waves towards a sample;
- a comparator to compare obtained contact acoustic impedance with measured electromechanical impedance;
- an elongated wave guide coupled to the ultrasonic transducer, said wave guide vibrates longitudinally and oscillates rotationally dependent upon a frequency of the ultrasonic waves;
- and
- an energy source.
An ultrasonic tip component for a micro tool comprising:
- an elongated column that vibrates in a longitudinal direction and oscillates in a rotation direction dependent upon a resonant frequency propogating through the elongated column, and said elongated column having a free distal end;
- a base from which said elongated column extends;
- an ultrasonic transducer coupled to said base on a side opposing said elongated column;
- and
- a coupling member for coupling said base of the tip to the tool.
A method of determining characteristics of a sample comprising the steps of:
- coupling a tip component to a micro tool, wherein said tip component includes an elongated column having a free distal end, a base from which said elongated column extends, an ultrasonic transducer coupled to said base on a side opposing said elongated column, and a coupling member for coupling said base of the tip to the tool;
- contacting the free distal end of said tip component with a sample;
- activating the ultrasonic transducer;
- calibrating said ultrasonic transducer;
- processing waves received by said transducer;
- and
- determining a characteristic of the sample.
Dependencies are inferred from the claim text.