# US 9,753,002 B2 · Humidity sensor with void within interconnect and method of manufacturing the same

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- Number: US 9,753,002 B2
- Document ID: US9753002B2
- Status: Granted
- Kind: B2
- Application number: 14/606,435
- Filed: 2015-01-27
- Published: 2016-01-28
- Granted: 2017-09-05
- Earliest claimed: 2014-07-22
- Assignees: MagnaChip Semiconductor, Ltd.
- Applicants: Magnachip Semiconductor, Ltd.
- Inventors: Francois Hebert; Ihl Hyun Cho
- Web page: https://patentgrep.com/patent/US9753002B2

## CPC

- G01N 27/223: {for determining moisture content, e.g. humidity (rain detectors on vehicle windows B60S1/0825)}
- G01N 27/048: {for determining moisture content of the material}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A humidity sensor and a method of manufacturing the same are provided where voids are formed within interconnects configured to facilitate the operation of the device and a humidity sensing material is deposited within the voids to detect the humidity. The accuracy with respect to the measurement of the humidity sensor is improved and manufacturing costs are lowered. The humidity sensor includes a substrate, a first interlayer insulating layer disposed on the substrate, first and second metal electrodes disposed adjacent to each other on the first interlayer insulating layer, an etch stop layer covering the first interlayer insulating layer and the first and second metal electrodes, a second interlayer insulating layer disposed on the first etch stop layer, voids formed within the second interlayer insulating layer, and a humidity sensing material deposited in the voids.

## Claims

### Claim 1

A humidity sensor comprising:
a substrate;
a first interlayer insulating layer disposed on the substrate;
first and second metal electrodes disposed adjacent to each other and on a surface of the first interlayer insulating layer;
an etch stop layer covering the first interlayer insulating layer and the first and second metal electrodes;
a second interlayer insulating layer disposed on the etch stop layer;
voids formed within the second interlayer insulating layer; and
a humidity sensing material deposited in the voids.

### Claim 2 (depends on 1)

The humidity sensor of claim 1, wherein a portion of the first metal electrode and the second metal electrode are surrounded by the humidity sensing material and another portion of the first metal electrode and the second metal electrode are surrounded by the second interlayer insulating layer.

### Claim 3 (depends on 2)

The humidity sensor of claim 2, wherein the portion of metal electrodes surrounded by the humidity sensing material serves as a humidity sensing capacitor and another portion of the metal electrodes surrounded by the second interlayer insulating layer serves as a reference capacitor.

### Claim 4 (depends on 1)

The humidity sensor of claim 1, wherein the humidity sensor is configured to detect humidity using a change in capacitance or resistance generated between the first and second metal electrodes.

### Claim 5 (depends on 1)

The humidity sensor of claim 1, further comprising:
a passivation layer disposed on the second interlayer insulating layer; and
the humidity sensing material extends to an upper surface of the passivation layer.

### Claim 6 (depends on 1)

The humidity sensor of claim 1, further comprising a protective layer disposed on the humidity sensing material.

### Claim 7 (depends on 1)

The humidity sensor of claim 1, wherein the humidity sensing material comprises polyimides.

### Claim 8 (depends on 1)

The humidity sensor of claim 1, wherein the etch stop layer comprises any one or any combination of a silicon-rich oxide layer, a silicon-rich nitride layer, a silicon nitride layer, and a silicon oxynitride layer.

### Claim 9 (depends on 1)

The humidity sensor of claim 1, wherein the first and second metal electrodes comprise c-shaped member disposed in an interlocking manner.

### Claim 10 (depends on 9)

The humidity sensor of claim 9, wherein legs of the first and second c-shaped metal electrodes are spaced apart.

### Claim 11 (depends on 5)

The humidity sensor of claim 5, further comprising a stress-relief layer disposed on the humidity sensing material and the passivation layer.

### Claim 12

A method of manufacturing a humidity sensor comprising:
disposing a first interlayer insulating layer on a substrate;
disposing first and second metal electrodes adjacent to each other and on a surface of the first interlayer insulating layer;
disposing a first etch stop layer covering the first interlayer insulating layer, and the first and second metal electrodes;
disposing a second interlayer insulating layer on the first etch stop layer;
disposing a passivation layer on the second interlayer insulating layer;
forming voids within the second interlayer insulating layer; and
depositing the humidity sensing material in the voids.

### Claim 13 (depends on 12)

The method of claim 12, wherein a portion of the first and the second metal electrodes are surrounded by the humidity sensing material and another portion of the first and the second metal electrodes are surrounded by the second interlayer insulating layer.

### Claim 14 (depends on 12)

The method of claim 12, wherein the forming of the voids comprises:
patterning the passivation layer and exposing the second interlayer insulating layer;
etching the exposed second interlayer insulating layer; and
exposing the first etch stop layer.

### Claim 15 (depends on 12)

The method of claim 12, further comprising disposing a protective layer on the humidity sensing material.

### Claim 16 (depends on 12)

The method of claim 12, further comprising depositing a second etch stop layer on surfaces of the voids.

### Claim 17 (depends on 14)

The method of claim 14, wherein an etch rate of the second interlayer insulating layer is greater than an etch rate of the first etch stop layer or the passivation layer.

### Claim 18

A humidity sensor comprising:
a first insulating layer disposed on a substrate;
interconnect conductors disposed on the first interlayer insulating layer;
an etch stop layer contacts the first interlayer insulating layer and a portion of the interconnect conductors;
a second insulating layer disposed on the etch stop layer;
voids formed within the second insulating layer; and
a humidity sensing material deposited in the voids.

### Claim 19 (depends on 18)

The humidity sensor of claim 18, wherein the interconnect conductors comprise a top electrode, a bottom electrode, and a metal plug connecting the top electrode and the bottom electrode.

### Claim 20 (depends on 19)

The humidity sensor of claim 19, wherein a cross-sectional area of the metal plug is smaller than a cross-sectional area of the top electrode or the bottom electrode, and the metal plug comprise a thin barrier metal.

### Claim 21 (depends on 18)

The method of claim 18, wherein at least one interconnect conductor is surrounded by the humidity sensing material and at least one interconnect conductor is surrounded by the second insulating layer.

### Claim 22 (depends on 1)

The humidity sensor of claim 1, wherein the first and second metal electrodes, the second interlayer insulating layer and the humidity sensing material are positioned adjacent to each other and in a same geometric plane that is parallel to a surface of the first interlayer insulating layer.

### Claim 23 (depends on 1)

The humidity sensor of claim 1, wherein the etch stop layer is in contact with the first interlayer insulating layer, and in contact with the first and second metal electrodes.

### Claim 24 (depends on 12)

The method of claim 12, wherein the first etch stop layer is in contact with the first interlayer insulating layer, and in contact with the first and second metal electrodes.