# US 9,752,996 B2 · X-ray inspection device

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- Number: US 9,752,996 B2
- Document ID: US9752996B2
- Status: Granted
- Kind: B2
- Application number: 15/502,491
- Filed: 2015-08-05
- Published: 2017-08-10
- Granted: 2017-09-05
- Earliest claimed: 2014-08-11
- Assignees: Ishida Co., Ltd.
- Applicants: Ishida Co., Ltd.
- Inventors: Kazuyuki Sugimoto; Osamu Hirose
- Web page: https://patentgrep.com/patent/US9752996B2

## CPC

- G01N 23/04: and forming images of the material
- G01N 23/083: the radiation being X-rays
- G01N 23/18: Investigating the presence of flaws defects or foreign matter
- G01N 2223/206: sources operating at different energy levels
- G01N 2223/423: multispectral imaging-multiple energy imaging
- G01N 2223/424: energy substraction image processing (dual energy processing)
- G01N 2223/5015: linear array
- G01N 2223/618: food
- G01N 2223/643: object on conveyor
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

Provided is a highly reliable X-ray inspection device having two line sensors, in which accurate inspection results can be obtained even when there is displacement of the mounting position of the line sensors. The X-ray inspection device is provided with a conveyor unit for conveying an article, an X-ray emitter, a first line sensor, a second line sensor, a detection unit, and a corrected-image generation unit. The X-ray emitter emits X-rays to the article conveyed by the conveyor unit. The first line sensor detects, in a low energy band, X-rays that have passed through the article. The second line sensor detects, in a high energy band, X-rays that have passed through the article. The detection unit detects positional displacement of the second line sensor with respect to the first line sensor in horizontal direction and vertical direction.

## Claims

### Claim 1

An X-ray inspection device comprising:
a conveying means configured to convey an article;
an X-ray source configured to emit X-rays to the article conveyed by the conveying means;
a first line sensor configured to detect, in a first energy band, X-rays that have passed through the article;
a second line sensor configured to detect, in a second energy band being different from the first energy band, X-rays that have passed through the article;
a detection unit configured to detect positional displacement of the second line sensor with respect to the first line sensor at least one direction of horizontal direction and vertical direction; and
a corrected-image generation unit configured to generate, based on the detection results of the detection unit, a corrected second X-ray image by correcting a second X-ray image of the article obtained based on the detection results of the second line sensor.

### Claim 2 (depends on 1)

The X-ray inspection device according to claim 1, wherein
the second line sensor is arranged below the first line sensor, and the second energy band is higher than the first energy band in energy.

### Claim 3 (depends on 1)

The X-ray inspection device according to claim 1, wherein
the detection unit is configured to detect positional displacement of the second line sensor with respect to the first line sensor in advance based on the detection result of the first line sensor and the second line sensor of the X-rays which have been emitted from the X-ray source to a sample having a known shape, which is conveyed by the conveying means, and have passed through the sample.

### Claim 4 (depends on 1)

The X-ray inspection device according to claim 1, wherein
the detection unit is configured to detect the horizontal-direction tilt of the second line sensor with respect to the first line sensor, and
the corrected-image generation unit is configured to generate the corrected second X-ray image by rotating the second X-ray image.

### Claim 5 (depends on 1)

The X-ray inspection device according to claim 1, wherein
the detection unit is configured to detect displacement of the second line sensor with respect to the first line sensor to an upstream side or a downstream side in the conveying direction of the conveying means, and
the corrected-image generation unit is configured to generate the corrected second X-ray image by moving the second X-ray image in a direction that corresponds to the upstream side or the downstream side in the conveying direction.

### Claim 6 (depends on 1)

The X-ray inspection device according to claim 1, wherein
the detection unit is configured to detect displacement of the second line sensor with respect to the first line sensor in a direction orthogonal to the conveying direction of the conveying means as viewed from above, and
the corrected-image generation unit is configured to generate the corrected second X-ray image by moving the second X-ray image in a direction that corresponds to the direction orthogonal to the conveying direction.

### Claim 7 (depends on 1)

The X-ray inspection device according to claim 1, wherein
the detection unit is configured to detect the vertical-direction tilt of the second line sensor with respect to the first line sensor, and
the corrected-image generation unit is configured to generate the corrected second X-ray image by enlarging the second X-ray image at one end side and reducing the second X-ray image at the other end side in a direction that corresponds to the tilt direction of the second line sensor.

### Claim 8 (depends on 1)

The X-ray inspection device according to claim 1, wherein
the detection unit is configured to detect the vertical-direction tilt of the second line sensor with respect to the first line sensor, and
the corrected-image generation unit is configured to generate the corrected second X-ray image by enlarging or reducing the second X-ray image in a direction that corresponds to the tilt direction of the second line sensor.

### Claim 9 (depends on 1)

The X-ray inspection device according to claim 1, wherein
the detection unit is configured to detect vertical-direction displacement of the second line sensor with respect to the first line sensor, and
the corrected-image generation unit is configured to generate the corrected second X-ray image by enlarging or reducing the second X-ray image.
