# US 9,752,944 B2 · Microelectromechanical sensing structure for a pressure sensor including a deformable test structure

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- Number: US 9,752,944 B2
- Document ID: US9752944B2
- Status: Granted
- Kind: B2
- Application number: 14/656,391
- Filed: 2015-03-12
- Published: 2015-09-17
- Granted: 2017-09-05
- Earliest claimed: 2014-03-12
- Assignees: STMicroelectronics S.r.l.
- Applicants: Stmicroelectronics S.R.L.
- Inventors: Alberto Pagani
- Web page: https://patentgrep.com/patent/US9752944B2

## CPC

- G01L 9/0054: {integral with a semiconducting diaphragm}
- G01L 9/0052: {of piezoresistive elements (circuits therefor G01L9/06)}
- G01L 9/0055: {bonded on a diaphragm}
- G01L 27/002: {Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination}
- Y10T 29/42: Piezoelectric device making
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A microelectromechanical sensing structure having a membrane region including a membrane that undergoes deformation as a function of a pressure and a first actuator that is controlled in a first operating mode and a second operating mode, the first actuator being such that, when it operates in the second operating mode, it contacts the membrane region and deforms the membrane in a way different from when it operates in the first operating mode.

## Claims

### Claim 1

A system, comprising:
a first die;
a sensor formed in the first die, the sensor including:
a first cavity;
a membrane over the first cavity;
a first actuator over the membrane, the first actuator being configured to operate in a first operating mode and in a second operating mode; and
a cap over the first actuator and over the membrane;
a second cavity formed by the cap, the first actuator being in the second cavity.

### Claim 2 (depends on 1)

The system of claim 1, further comprising a second die, the cap being formed by the second die.

### Claim 3 (depends on 1)

The system of claim 1 wherein the first actuator includes a first electrically conductive portion that is partially in the second cavity and partially outside of the second die, the second die in contact with a middle part of the first electrically conductive portion.

### Claim 4 (depends on 1)

The system of claim 1, further comprising:
an electronic unit electrically coupled to the sensor; and
a speaker electrically coupled to the electronic unit.