# US 9,752,901 B2 · Scale and optical encoder

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- Number: US 9,752,901 B2
- Document ID: US9752901B2
- Status: Granted
- Kind: B2
- Application number: 14/721,455
- Filed: 2015-05-26
- Published: 2015-12-03
- Granted: 2017-09-05
- Earliest claimed: 2014-05-27
- Assignees: Mitutoyo Corporation
- Applicants: Mitutoyo Corporation
- Inventors: Yoshiaki Kato
- Web page: https://patentgrep.com/patent/US9752901B2

## CPC

- G01D 5/34715: {Scale reading or illumination devices}
- G01D 5/24438: {Special design of the sensing element or scale}
- G01D 5/347: using displacement encoding scales
- G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR

## Abstract

A scale and an optical encoder capable of maintaining an accuracy of a reference position irrespective of an error in attaching a detection head are provided. The scale according to the present invention is a scale including main-signal scale gratings having grating patterns of a predetermined pitch, and a reference-signal pattern, in which the main-signal scale gratings are arranged in parallel in a direction perpendicular to a length measurement axis of the main-signal scale gratings and are different from each other in phase by ½, and the reference-signal pattern is formed on the length measurement axis of the main-signal scale gratings. The optical encoder according to the present invention includes a light source, main-signal light source gratings, reference-signal light source gratings, main-signal receiver gratings, and a reference-signal receiver element.

## Claims

### Claim 1

A scale comprising first and second main-signal scale gratings having grating patterns of a predetermined pitch, and a reference-signal pattern, wherein:
each of the two main-signal scale gratings comprises transmitting parts and non-transmitting parts, the non-transmitting parts of each of the two main-signal scale gratings are arranged at the predetermined pitch in parallel to a length measurement axis of the scale, and the non-transmitting parts of the first main-signal scale grating are shifted by one half the predetermined pitch from the non-transmitting parts of the second main-signal scale grating, and
the reference-signal pattern is formed on a length measurement axis of the first main-signal scale grating and on a length measurement axis of the second main-signal scale grating.

### Claim 2 (depends on 1)

The scale according to claim 1, wherein a part of the grating patterns of the main-signal scale gratings is disturbed, whereby the reference-signal pattern is formed.

### Claim 3 (depends on 1)

The scale according to claim 1, wherein the reference-signal pattern extends to cross the first and the second main-signal scale gratings in a direction perpendicular to the length measurement axis of the scale, and the reference-signal pattern does not disturb the grating patterns for the first main-signal scale grating and disturbs the grating patterns for the second main-signal scale grating.

### Claim 4 (depends on 1)

The scale according to claim 1, wherein the reference-signal pattern comprises a non-transmitting part that extends in the direction perpendicular to the length measurement axis of the scale and interrupts light, and the length of the reference-signal pattern in the length measurement direction is equal to the length of half the cycle of the pitch of the main-signal scale gratings.

### Claim 5 (depends on 1)

The scale according to claim 1, wherein the reference-signal pattern is a transmitting part extending in the direction perpendicular to the length measurement axis of the scale.

### Claim 6 (depends on 1)

The scale according to claim 1, wherein a plurality of the reference-signal patterns are provided.

### Claim 7 (depends on 1)

The scale according to claim 1, wherein:
the first and second main-signal scale gratings arranged in parallel form one pair, and
a plurality of pairs of the first and the second main-signal scale gratings are arranged in parallel in the direction perpendicular to the length measurement axis of the scale.

### Claim 8 (depends on 1)

An optical encoder comprising:
the scale according to claim 1;
a light source;
main-signal light source gratings that are arranged between the light source and the scale to form a main-signal interference fringe in collaboration with the main-signal scale gratings;
reference-signal light source gratings that are arranged between the light source and the scale to form a reference-signal interference fringe in collaboration with the reference-signal pattern;
main-signal detection means that detects a main signal from the main-signal interference fringe; and
reference-signal detection means that detects a reference signal from the reference-signal interference fringe, wherein:
the main-signal light source gratings comprise gratings formed to have a pitch so that two or more interference fringes formed by the two or more main-signal scale gratings and the main-signal light source gratings have the same phase, and
the reference-signal light source gratings comprise gratings formed to have a pitch so that two or more interference fringes formed by the two or more main-signal scale gratings and the reference-signal light source grating are different from each other in phase by ½.

### Claim 9 (depends on 8)

The optical encoder according to claim 8, wherein:
the main-signal light source gratings and the reference-signal light source gratings are arranged in parallel to each other in a length measurement direction of the scale,
the main-signal detection means is arranged in parallel to the main-signal light source gratings so as to be opposed to the main-signal light source gratings with the scale interposed therebetween, and
the reference-signal detection means is arranged so as to be opposed to the reference-signal light source gratings with the scale interposed therebetween.
