# US 9,752,249 B2 · Film forming apparatus and film forming method

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 9,752,249 B2
- Document ID: US9752249B2
- Status: Granted
- Kind: B2
- Application number: 15/062,293
- Filed: 2016-03-07
- Published: 2016-09-15
- Granted: 2017-09-05
- Earliest claimed: 2015-03-11
- Assignees: Toyota Jidosha Kabushiki Kaisha
- Applicants: Toyota Jidosha Kabushiki Kaisha
- Inventors: Motoki Hiraoka; Hiroshi Yanagimoto; Yuki Sato
- Web page: https://patentgrep.com/patent/US9752249B2

## CPC

- C25D 17/002: {Cell separation, e.g. membranes, diaphragms}
- C25D 3/00: Electroplating: Baths therefor
- C25D 5/04: Electroplating with moving electrodes
- C25D 5/08: Electroplating with moving electrolyte e.g. jet electroplating {(using locally applied jets of electrolyte C25D5/026)}
- C25D 17/12: Shape or form (C25D17/14 takes precedence)
- C25D 7/123: {Semiconductors first coated with a seed layer or a conductive layer}
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR

## Abstract

A film forming apparatus includes: an anode; a solid electrolyte membrane that is arranged between the anode and an substrate that serves as a cathode, and that contains metal ions; a power supply that applies a voltage between the anode and the substrate in a state in which the solid electrolyte membrane is in contact with the substrate from above; and an oscillating portion configured to oscillate at least the anode in the state in which the solid electrolyte membrane is in contact with the substrate.

## Claims

### Claim 1

A film forming apparatus comprising:
an anode;
a solid electrolyte membrane that is arranged between the anode and a substrate that serves as a cathode, and that contains metal ions;
a power supply that applies a voltage between the anode and the substrate in a state in which the solid electrolyte membrane is in contact with the substrate from above;
an oscillating portion configured to oscillate at least the anode in the state in which the solid electrolyte membrane is in contact with the substrate; and
a liquid storing portion provided between the anode and the solid electrolyte membrane, the liquid storing portion storing an electrolytic solution that contains the metal ions in a manner such that the electrolytic solution contacts the anode and the solid electrolyte membrane, wherein
the liquid storing portion includes a liquid supply port that supplies the electrolytic solution into the liquid storing portion, and a liquid discharge port that discharges the electrolytic solution from within the liquid storing portion, the liquid supply port and the liquid discharge port being provided such that the electrolytic solution flows between the anode and the solid electrolyte membrane, wherein
the liquid discharge port is provided in a position higher than the liquid supply port, wherein
a surface of the anode that faces the solid electrolyte membrane is inclined upward with respect to a horizontal plane, in a direction from the liquid supply port toward the liquid discharge port.

### Claim 2 (depends on 1)

The film forming apparatus according to claim 1, further comprising:
a gas discharge port that discharges gas that is inside the liquid storing portion, the gas discharge port being provided in a position higher than the liquid discharge port, between the liquid supply port and the liquid discharge port, the gas discharge port being provided closer to the liquid discharge port than the liquid supply port.

### Claim 3 (depends on 1)

The film forming apparatus according to claim 1, wherein
the anode includes
a first surface that faces the solid electrolyte membrane;
a second surface that is on a side opposite the first surface; and
a through-hole provided from the first surface through to the second surface.

### Claim 4 (depends on 3)

The film forming apparatus according to claim 3, wherein the liquid discharge port is provided on a second surface side with respect to the anode.