Sintering apparatus and method for sintering
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsKazuya Uchida, Tetsuya Otosaka
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsKazuya Uchida, Tetsuya Otosaka
Estimating the term…
A sintering apparatus for sintering a porous glass base material, including a furnace core tube surrounded by heaters, the furnace core tube housing the porous glass base material; a lid member having an insertion hole through which a holding rod coupled with the porous glass base material is inserted, the lid member mounted at one end of the furnace core tube; a sealing chamber having a supply port that introduces seal gas and a discharging port that discharges the seal gas, the sealing chamber provided at the lid member covering the insertion hole; and a cylindrical member that causes a pressure difference between gas inside of the tube of an inside the furnace core tube and gas inside of the sealing chamber to be generated while the holding rod is inserted through the cylindrical member inside of the sealing chamber.
A sintering apparatus for sintering a porous glass base material, comprising:
A porous glass base material sintering method for housing and sintering the porous glass base material in a furnace core tube, comprising:
Dependencies are inferred from the claim text.