# US 9,751,757 B2 · Single motor dynamic calibration unit

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- Number: US 9,751,757 B2
- Document ID: US9751757B2
- Status: Granted
- Kind: B2
- Application number: 13/783,606
- Filed: 2013-03-04
- Published: 2014-09-04
- Granted: 2017-09-05
- Earliest claimed: 2013-03-04
- Assignees: Kionix, Inc.
- Applicants: Kionix, Inc.
- Inventors: Nathan L. Stirling; Luke E. DeWalt; James E. Strait; Scott G. Adams
- Web page: https://patentgrep.com/patent/US9751757B2

## CPC

- B81C 99/005: {Test apparatus}
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)

## Abstract

A calibration unit, system, and method for calibrating a device under test are provided. The calibration unit, system, and method use a single axis rotational unit to calibrate devices under test on a test head. The single axis rotation unit is configured to extend at an angle from a known axis. The test head can be designed in the shape of a frustum with multiple sides. The calibration unit, system, and method can use combinations of gravitational excitation, Helmholtz coil excitation, and rotational rate excitation for calibrating the device under test. The calibration unit, system, and method can calibrate a 3 degree for freedom or higher MEMS devices.

## Claims

### Claim 1

A calibration unit comprising:
a test head configured to rotate about a rotation axis between a first stationary angular position and a second stationary angular position, the rotation axis extending at an angle relative to a known axis, the test head having a first position configured to receive a first device under test (DUT) comprising a first application specific integrated circuit (ASIC) and a second position configured to receive a second DUT comprising a second ASIC; and
a measurement unit electrically coupled to the first position and the second position, configured to measure a first output of the first DUT as the test head rotates between the first stationary angular position and the second stationary angular position, and configured to measure a second output of the first DUT at the second stationary angular position while the second DUT is loaded or unloaded onto the second position of the test head,
wherein rotation of the test head about the rotation axis allows for excitation of at least three degrees of freedom of the first DUT, and
wherein the measurement unit is configured to calibrate the first DUT by programming a calibration coefficient into the first ASIC.

### Claim 2 (depends on 1)

The calibration unit of claim 1, wherein the first DUT and the second DUT are each a triaxis MEMS sensor.

### Claim 3 (depends on 2)

The calibration unit of claim 2, wherein the triaxis MEMS sensor includes a magnetometer, gyroscope, accelerometer, pressure sensor, angular accelerometer or a combination thereof.

### Claim 4 (depends on 1)

The calibration unit of claim 1, wherein the rotation of the test head about the rotation axis allows for excitation of at least six degrees of freedom of the first DUT.

### Claim 5 (depends on 4)

The calibration unit of claim 4, wherein the rotation of the test head about the rotation axis allows for excitation of nine degrees of freedom of the first DUT.

### Claim 6 (depends on 1)

The calibration unit of claim 1, further comprising electrical slip rings to electrically couple the measurement unit to the first position and the second position.

### Claim 7 (depends on 1)

The calibration unit of claim 1, wherein the known axis is earth's gravitational field.

### Claim 8 (depends on 1)

The calibration unit of claim 1, wherein the rotation of the test head about the rotation axis allows for gravitational excitation, Helmholtz coil excitation, or rotational-rate excitation of the at least three degrees of freedom of the first DUT.

### Claim 9 (depends on 1)

The calibration unit of claim 1, wherein the rotation of the test head about the rotation axis allows for a combination of gravitational excitation, Helmholtz coil excitation, and rotational-rate excitation of at least six degrees of freedom of the first DUT.

### Claim 10 (depends on 1)

The calibration unit of claim 1, further comprising a computer controlled remote servo motor coupled to the test head and configured to adjust an angular position, velocity, or acceleration of the test head.

### Claim 11 (depends on 10)

The calibration unit of claim 10, wherein the computer controlled remote servo motor is further configured to rotate the test head from a distance such that an electromagnetic field of the motor does not affect the first DUT and the second DUT.

### Claim 12 (depends on 1)

The calibration unit of claim 1, wherein the measurement unit electrically is further configured to measure a first output of the second DUT as the test head rotates between the first stationary angular position and the second stationary angular position, and further configured to measure a second output of the second DUT at the second stationary angular position;
wherein the rotation of the test head about the rotation axis allows for excitation of at least three degrees of freedom of the second DUT substantially concurrently with the excitation of the at least three degrees of freedom of the first DUT.

### Claim 13

A method for configuring devices under test (DUTS), comprising:
loading a first device under test (DUT) comprising a first application specific integrated circuit (ASIC) onto a test head at a loading position;
rotating the test head around a single rotation axis to a first fixed position, wherein the single rotation axis is at an angle relative to a known axis;
exciting the first DUT at the first fixed position;
measuring a first output of the first DUT at the first fixed position;
rotating the test head around the single rotation axis to a second fixed position;
exciting the first DUT at the second fixed position;
measuring a second output of the first DUT at the second fixed position;
programming a calibration coefficient into the first ASIC while the first DUT is loaded on the test head;
loading, substantially concurrently with measuring the second output of the first DUT at the second fixed position, a second DUT comprising a second ASIC onto the test head; and
unloading the first DUT at an unloading position,
wherein the exciting the first DUT at the first and second positions allows for excitation of at least three degrees of freedom of the first DUT.

### Claim 14 (depends on 13)

The method of claim 13, wherein the first DUT and the second DUT are each a triaxis MEMS magnetometer, gyroscope, accelerometer, or a combination thereof.

### Claim 15 (depends on 13)

The method of claim 13, further comprising exciting the first DUT as the test head rotates, and measuring a third output of the first DUT as the test head rotates.

### Claim 16 (depends on 13)

The method of claim 13, further comprising:
exciting the second DUT at the second fixed position; and
measuring an output of the second DUT at the second fixed position, wherein the exciting the first DUT at the first fixed position happens substantially concurrently with the exciting the second DUT at the second fixed position.

### Claim 17 (depends on 13)

The method of claim 13, wherein the known axis is the earth's gravitational field.

### Claim 18 (depends on 13)

The method of claim 13, further comprising performing gyroscopic or magnetic sensor testing.

### Claim 19 (depends on 13)

The method of claim 13, wherein the exciting the first DUT at the first and second fixed positions comprises gravitational excitation, Helmholtz coil excitation, rotational rate excitation, or a combination thereof.

### Claim 20

A triaxis MEMS calibration system comprising:
a calibration unit comprising:
a test head configured to rotate about a rotation axis between a first stationary angular position and a second stationary angular position, the rotation axis extending at an angle relative to a known axis, the test head having a first position configured to receive a first device under test (DUT) comprising a first application specific integrated circuit (ASIC) and a second position configured to receive a second DUT comprising a second ASIC; and
a measurement unit electrically coupled to the first position and a second position, configured to receive the first DUT, configured to measure a first output of the first DUT as the test head rotates between the first stationary angular position and the second stationary angular position, and configured to measure a second output of the first DUT at the second stationary angular position,
wherein rotation of the test head about the rotation axis allows for excitation of at least three degrees of freedom of the first DUT, and
wherein the measurement unit is configured to calibrate the first DUT by programming a calibration coefficient into the first ASIC; and
a turret handler configured to
place the first DUT onto the test head and in the first position prior to rotation of the test head,
remove the first DUT from the test head and the first position after rotation, and
place the second DUT onto the second position of the test head while the measurement unit measures the second output of the first DUT at the second stationary angular position.

### Claim 21 (depends on 20)

The triaxis MEMS calibration system of claim 20, further comprising a computer controlled remote servo motor coupled to the test head and configured to adjust an angular position, velocity, or acceleration of the test head.

### Claim 22 (depends on 20)

The triaxis MEMS calibration system of claim 20, wherein the test head further comprises a third position configured to hold a third DUT; and wherein the turret handler is further configured to place the third DUT onto the test head and to remove the third DUT from the test head.

### Claim 23 (depends on 20)

The triaxis MEMS calibration system of claim 20, wherein the calibration coefficient is based on a measured first output of the first DUT as the test head rotates between the first stationary angular position and the second stationary angular position, and on a measured second output of the first DUT at the second stationary angular position.

### Claim 24 (depends on 15)

The method of claim 15, wherein the calibration coefficient is based on the measured third output of the first DUT as the test head rotates, the measured first output of the first DUT at the first fixed position, and the measured second output of the first DUT at the second fixed position.

### Claim 25 (depends on 24)

The method of claim 24, wherein the loading position and the unloading position are the same position.