# US 9,751,754 B2 · Package formation method and MEMS package

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- Number: US 9,751,754 B2
- Document ID: US9751754B2
- Status: Granted
- Kind: B2
- Application number: 15/112,222
- Filed: 2015-01-27
- Published: 2016-11-17
- Granted: 2017-09-05
- Earliest claimed: 2014-01-27
- Assignees: National Institute of Advanced Industrial Science and Technology
- Applicants: National Institute of Advanced Industrial Science and Technology
- Inventors: Yuuichi Kurashima; Hideki Takagi; Atsuhiko Maeda
- Web page: https://patentgrep.com/patent/US9751754B2

## CPC

- B81C 1/00269: {Bonding of solid lids or wafers to the substrate}
- B81C 2203/0118: Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
- B81C 2203/019: characterised by the material or arrangement of seals between parts
- B81C 2203/035: Soldering
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)

## Abstract

This invention includes a sacrificial thin film formation step for chemical-mechanical polishing a temporary substrate made of a readily polishable material and sputtering a metal thin film along the smoothly polished surface, and a first bonding step for forming a sealing frame obtained by bringing at least a noble metal on the metal thin film and bonding a substrate on the sealing frame. This invention also includes a temporary substrate removal step for then removing the metal thin film along with the temporary substrate and exposing a new surface at the tip of the sealing frame; and a second bonding step for sputtering a noble metal thin film around a precision machine element on the machine substrate, bringing the new surface of the sealing frame into contact onto the noble metal thin film and bonding the new surface of the sealing frame onto the noble metal thin film at room temperature.

## Claims

### Claim 1

A package formation method for housing a precision machine element on a machine substrate in a sealed, hollow interior space, the method comprising:
forming a sacrificial thin film by chemically and mechanically polishing a temporary substrate of a polishable material and sputtering a metal thin film on the polished surface;
forming a sealing frame by applying at least a noble metal on the metal thin film, and bonding a substrate with the sealing frame;
selectively removing the metal thin film of the temporary substrate and exposing a new face at a tip of the sealing frame; and
forming a noble metal thin film around the precision machine element on the machine substrate, bringing the new face of the sealing frame into contact with the noble metal thin film, and bonding the new face of the sealing frame onto the noble metal thin film at room temperature.

### Claim 2 (depends on 1)

The package formation method according to claim 1, wherein the forming a sealing frame includes forming the sealing frame by a plating method, and the forming a sacrificial thin film includes forming a seed metal thin film of a noble metal on the metal thin film of titanium or chrome.

### Claim 3 (depends on 2)

A MEMS package formed by the package formation method according to claim 2, capable of maintaining an interior vacuum condition of 10−4 Pa for at least 6 months.

### Claim 4 (depends on 2)

The package formation method according to claim 2, wherein the noble metal constituting the seed metal thin film is gold.

### Claim 5 (depends on 4)

A MEMS package formed by the package formation method according to claim 4, capable of maintaining an interior vacuum condition of 10−4 Pa for at least 6 months.

### Claim 6 (depends on 4)

The package formation method according to claim 4, wherein the forming a noble metal thin film includes activating bonding surfaces by plasma ashing.

### Claim 7 (depends on 6)

A MEMS package formed by the package formation method according to claim 6, capable of maintaining an interior vacuum condition of 10−4 Pa for at least 6 months.

### Claim 8 (depends on 6)

The package formation method according to claim 6, wherein the bonding at the room temperature is performed at 200° C. or less.

### Claim 9 (depends on 8)

A MEMS package formed by the package formation method according to claim 8, capable of maintaining an interior vacuum condition of 10−4 Pa for at least 6 months.

### Claim 10 (depends on 1)

A MEMS package formed by the package formation method according to claim 1, capable of maintaining an interior vacuum condition of 10−4 Pa for at least 6 months.

### Claim 11 (depends on 1)

The package formation method according to claim 1, wherein the polished surface is a super smooth face having a surface roughness Sq of 0.2 nm or less.

### Claim 12 (depends on 1)

The package formation method according to claim 1, wherein the sacrificial thin-film comprises titanium.