# US 9,751,307 B2 · Piezoelectric device, liquid ejection head, and liquid ejection apparatus

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- Number: US 9,751,307 B2
- Document ID: US9751307B2
- Status: Granted
- Kind: B2
- Application number: 15/192,823
- Filed: 2016-06-24
- Published: 2017-01-05
- Granted: 2017-09-05
- Earliest claimed: 2015-07-02
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Motoki Takabe; Shiro Yazaki; Yuma Fukuzawa; Eiju Hirai
- Web page: https://patentgrep.com/patent/US9751307B2

## CPC

- B41J 2/14274: {of stacked structure type, deformed by compression/extension and disposed on a diaphragm}
- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- H10N 30/082: by etching, e.g. lithography
- H10N 30/20: with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N 30/50: having a stacked or multilayer structure
- H10N 30/508: {adapted for alleviating internal stress, e.g. cracking control layers}
- H10N 30/706: {characterised by the underlying bases, e.g. substrates}
- H10N 30/8554: {Lead-zirconium titanate [PZT] based}
- H10N 30/871: {Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes}
- B41J 2002/14241: {having a cover around the piezoelectric thin film element}
- B41J 2202/11: characterised by specific geometrical characteristics
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

An empty chamber component includes a pressure chamber formation substrate where a pressure chamber as an empty chamber is defined and a communication substrate bonded to the pressure chamber formation substrate. A piezoelectric element is provided on one side of the pressure chamber formation substrate. A flexible surface is located between the piezoelectric element and the pressure chamber. Empty portions are defined by the communication substrate closing recessed portions in the pressure chamber formation substrate. The empty portions are formed at positions where ends of the active section of the piezoelectric element pass through the empty portions in plan view.

## Claims

### Claim 1

A piezoelectric device comprising:
an empty chamber component defining an empty chamber; and
a piezoelectric element provided on one side of the empty chamber component with a flexible surface located between the piezoelectric element and the empty chamber, the piezoelectric element including a first electrode, a piezoelectric component, and a second electrode that are stacked in this order from a side where the flexible surface is formed,
wherein in the empty chamber component, an empty portion independent of the empty chamber is formed at a position where an end of an active section overlaps the empty portion in plan view, the active section being an overlapping portion of the first electrode, the piezoelectric component, and the second electrode in plan view.

### Claim 2 (depends on 1)

The piezoelectric device according to claim 1,
wherein the empty chamber component includes (i) an empty chamber formation substrate where the empty chamber is defined and (ii) a flexible component serving as the flexible surface, and
the empty portion is defined by the flexible component and a recessed portion in the empty chamber formation substrate.

### Claim 3 (depends on 2)

A liquid ejection head comprising:
the piezoelectric device according to claim 2; and
a nozzle that communicates with the empty chamber of the piezoelectric device,
wherein driving of a piezoelectric element of the piezoelectric device causes a pressure change in a liquid in the empty chamber, and the pressure change allows the liquid to be ejected through the nozzle.

### Claim 4 (depends on 1)

The piezoelectric device according to claim 1,
wherein the empty chamber component includes (i) a first empty chamber formation substrate where the empty chamber is defined and (ii) a second empty chamber formation substrate bonded to a side of the first empty chamber formation substrate, the side being opposite to a side where the piezoelectric element is formed, and
the empty portion is defined by the first empty chamber formation substrate and a recessed portion in the second empty chamber formation substrate.

### Claim 5 (depends on 4)

The piezoelectric device according to claim 4,
wherein the empty portion includes (i) first empty portions defined by the second empty chamber formation substrate and recessed portions in the first empty chamber formation substrate and (ii) second empty portions defined by the first empty chamber formation substrate and recessed portions in the second empty chamber formation substrate, and
in the empty chamber component, the first empty portions and the second empty portions are alternately formed in a direction in which a plurality of the empty chambers are arranged in parallel.

### Claim 6 (depends on 5)

A liquid ejection head comprising:
the piezoelectric device according to claim 5; and
a nozzle that communicates with the empty chamber of the piezoelectric device,
wherein driving of a piezoelectric element of the piezoelectric device causes a pressure change in a liquid in the empty chamber, and the pressure change allows the liquid to be ejected through the nozzle.

### Claim 7 (depends on 4)

The piezoelectric device according to claim 4,
wherein the flexible surface is integrally formed with the first empty chamber formation substrate.

### Claim 8 (depends on 7)

A liquid ejection head comprising:
the piezoelectric device according to claim 7; and
a nozzle that communicates with the empty chamber of the piezoelectric device,
wherein driving of a piezoelectric element of the piezoelectric device causes a pressure change in a liquid in the empty chamber, and the pressure change allows the liquid to be ejected through the nozzle.

### Claim 9 (depends on 4)

A liquid ejection head comprising:
the piezoelectric device according to claim 4; and
a nozzle that communicates with the empty chamber of the piezoelectric device,
wherein driving of a piezoelectric element of the piezoelectric device causes a pressure change in a liquid in the empty chamber, and the pressure change allows the liquid to be ejected through the nozzle.

### Claim 10 (depends on 1)

A liquid ejection head comprising:
the piezoelectric device according to claim 1; and
a nozzle that communicates with the empty chamber of the piezoelectric device,
wherein driving of a piezoelectric element of the piezoelectric device causes a pressure change in a liquid in the empty chamber, and the pressure change allows the liquid to be ejected through the nozzle.

### Claim 11 (depends on 10)

A liquid ejection apparatus comprising the liquid ejection head according to claim 10.

### Claim 12

A piezoelectric device comprising:
a chamber component defining an pressure chamber; and
a piezoelectric element provided on one side of the chamber component with a flexible surface located between the piezoelectric element and the pressure chamber, the piezoelectric element including a first electrode, a piezoelectric component, and a second electrode that are arranged in this order from a side where the flexible surface is formed,
wherein in the chamber component, an chamber portion independent of the pressure chamber is formed at a position where an end of an active section overlaps the chamber portion in plan view, the active section being an overlapping portion of the first electrode, the piezoelectric component, and the second electrode in plan view.

### Claim 13 (depends on 12)

The piezoelectric device according to claim 12, wherein the chamber portion is shallower than the pressure chamber.

### Claim 14 (depends on 12)

A liquid ejection head comprising:
the piezoelectric device according to claim 12; and
a nozzle that communicates with the pressure chamber of the piezoelectric device
wherein driving of a piezoelectric element of the piezoelectric device causes a pressure change in a liquid in the pressure chamber, and the pressure change allows the liquid to be ejected through the nozzle.

### Claim 15 (depends on 14)

A liquid ejection apparatus comprising the liquid ejection head according to claim 14.

### Claim 16

A piezoelectric device comprising:
a chamber component defining an first chamber; and
a piezoelectric element provided on one side of the chamber component with a flexible surface located between the piezoelectric element and the first chamber, the piezoelectric element including a first electrode, a piezoelectric component, and a second electrode that are arranged in this order from a side where the flexible surface is formed,
wherein in the chamber component, an second chamber is formed at a position where an end of an active section overlaps the second chamber in plan view, a wall is formed between the first chamber and second chamber in the chamber component, the active section being an overlapping portion of the first electrode, the piezoelectric component, and the second electrode in plan view.

### Claim 17 (depends on 16)

The piezoelectric device according to claim 16, wherein the second chamber is shallower than the first chamber.

### Claim 18 (depends on 16)

A liquid ejection head comprising:
the piezoelectric device according to claim 16; and
a nozzle that communicates with the first chamber of the piezoelectric device,
wherein driving of a piezoelectric element of the piezoelectric device causes a pressure change in a liquid in the first chamber, and the pressure change allows the liquid to be ejected through the nozzle.

### Claim 19 (depends on 18)

A liquid ejection apparatus comprising the liquid ejection head according to claim 18.